9/11/2012	12:09:04 AM	H2 valve closed
9/11/2012	12:09:04 AM	BCl3 valve closed
9/11/2012	12:09:04 AM	PH3 valve closed
9/11/2012	12:09:04 AM	SiCl4 pre valve closed
9/11/2012	12:09:04 AM	SiCl4 post valve closed
9/11/2012	12:09:04 AM	Main Vac valve closed
9/11/2012	12:09:04 AM	Bypass valve closed
9/11/2012	12:09:04 AM	Helium valve opened
9/11/2012	12:09:04 AM	Bubbler valve opened
9/11/2012	12:09:04 AM	Helium MFC set to  500.000000
9/11/2012	12:09:04 AM	H2 MFC set to  0.000000
9/11/2012	12:09:04 AM	BCl3 MFC set to  0.000000
9/11/2012	12:09:04 AM	PH3 MFC set to  0.000000
9/11/2012	12:09:04 AM	SiCl4 MFC set to  0.000000
9/11/2012	12:09:04 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:09:04 AM	Tube furnace set to 0
9/11/2012	12:29:04 AM	Helium valve closed
9/11/2012	12:29:04 AM	H2 valve closed
9/11/2012	12:29:04 AM	BCl3 valve closed
9/11/2012	12:29:04 AM	PH3 valve closed
9/11/2012	12:29:04 AM	SiCl4 pre valve closed
9/11/2012	12:29:04 AM	SiCl4 post valve closed
9/11/2012	12:29:04 AM	Main Vac valve closed
9/11/2012	12:29:04 AM	Bypass valve closed
9/11/2012	12:29:04 AM	Bubbler valve closed
9/11/2012	12:29:04 AM	Helium MFC set to  0.000000
9/11/2012	12:29:04 AM	H2 MFC set to  0.000000
9/11/2012	12:29:04 AM	BCl3 MFC set to  0.000000
9/11/2012	12:29:04 AM	PH3 MFC set to  0.000000
9/11/2012	12:29:04 AM	SiCl4 MFC set to  0.000000
9/11/2012	12:29:04 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:29:05 AM	Tube furnace set to 0
9/11/2012	12:49:05 AM	Helium valve closed
9/11/2012	12:49:05 AM	H2 valve closed
9/11/2012	12:49:05 AM	BCl3 valve closed
9/11/2012	12:49:05 AM	PH3 valve closed
9/11/2012	12:49:05 AM	SiCl4 pre valve closed
9/11/2012	12:49:05 AM	SiCl4 post valve closed
9/11/2012	12:49:05 AM	Main Vac valve closed
9/11/2012	12:49:05 AM	Bubbler valve closed
9/11/2012	12:49:05 AM	Bypass valve opened
9/11/2012	12:49:05 AM	Helium MFC set to  0.000000
9/11/2012	12:49:05 AM	H2 MFC set to  0.000000
9/11/2012	12:49:05 AM	BCl3 MFC set to  0.000000
9/11/2012	12:49:05 AM	PH3 MFC set to  0.000000
9/11/2012	12:49:05 AM	SiCl4 MFC set to  0.000000
9/11/2012	12:49:05 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:49:05 AM	Tube furnace set to 0
9/11/2012	12:50:02 AM	Helium valve closed
9/11/2012	12:50:02 AM	H2 valve closed
9/11/2012	12:50:02 AM	BCl3 valve closed
9/11/2012	12:50:02 AM	PH3 valve closed
9/11/2012	12:50:02 AM	SiCl4 pre valve closed
9/11/2012	12:50:02 AM	SiCl4 post valve closed
9/11/2012	12:50:02 AM	Main Vac valve closed
9/11/2012	12:50:02 AM	Bubbler valve closed
9/11/2012	12:50:02 AM	Bypass valve opened
9/11/2012	12:50:02 AM	Helium MFC set to  0.000000
9/11/2012	12:50:02 AM	H2 MFC set to  0.000000
9/11/2012	12:50:02 AM	BCl3 MFC set to  0.000000
9/11/2012	12:50:02 AM	PH3 MFC set to  0.000000
9/11/2012	12:50:02 AM	SiCl4 MFC set to  0.000000
9/11/2012	12:50:02 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:50:02 AM	Tube furnace set to 0
9/11/2012	12:51:02 AM	Helium valve closed
9/11/2012	12:51:02 AM	H2 valve closed
9/11/2012	12:51:02 AM	BCl3 valve closed
9/11/2012	12:51:02 AM	PH3 valve closed
9/11/2012	12:51:02 AM	SiCl4 pre valve closed
9/11/2012	12:51:02 AM	SiCl4 post valve closed
9/11/2012	12:51:02 AM	Bypass valve closed
9/11/2012	12:51:02 AM	Bubbler valve closed
9/11/2012	12:51:02 AM	Main Vac valve opened
9/11/2012	12:51:02 AM	Helium MFC set to  0.000000
9/11/2012	12:51:02 AM	H2 MFC set to  0.000000
9/11/2012	12:51:02 AM	BCl3 MFC set to  0.000000
9/11/2012	12:51:02 AM	PH3 MFC set to  0.000000
9/11/2012	12:51:02 AM	SiCl4 MFC set to  0.000000
9/11/2012	12:51:02 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:51:02 AM	Tube furnace set to 0
9/11/2012	1:51:02 AM	Run finished at 1:51 AM
9/11/2012	8:59:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2012	8:59:38 AM	Recipe started at 8:59 AM
9/11/2012	8:59:38 AM	Helium valve closed
9/11/2012	8:59:38 AM	H2 valve closed
9/11/2012	8:59:38 AM	BCl3 valve closed
9/11/2012	8:59:38 AM	PH3 valve closed
9/11/2012	8:59:38 AM	SiCl4 pre valve closed
9/11/2012	8:59:38 AM	SiCl4 post valve closed
9/11/2012	8:59:38 AM	Main Vac valve closed
9/11/2012	8:59:38 AM	Bypass valve closed
9/11/2012	8:59:38 AM	Bubbler valve closed
9/11/2012	8:59:38 AM	Helium MFC set to  0.000000
9/11/2012	8:59:38 AM	H2 MFC set to  0.000000
9/11/2012	8:59:38 AM	BCl3 MFC set to  0.000000
9/11/2012	8:59:38 AM	PH3 MFC set to  0.000000
9/11/2012	8:59:38 AM	SiCl4 MFC set to  0.000000
9/11/2012	8:59:38 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	8:59:38 AM	Tube furnace set to 0
9/11/2012	8:59:41 AM	H2 valve closed
9/11/2012	8:59:41 AM	BCl3 valve closed
9/11/2012	8:59:41 AM	PH3 valve closed
9/11/2012	8:59:41 AM	SiCl4 pre valve closed
9/11/2012	8:59:41 AM	SiCl4 post valve closed
9/11/2012	8:59:41 AM	Main Vac valve closed
9/11/2012	8:59:41 AM	Bypass valve closed
9/11/2012	8:59:41 AM	Bubbler valve closed
9/11/2012	8:59:41 AM	Helium valve opened
9/11/2012	8:59:41 AM	Helium MFC set to  500.000000
9/11/2012	8:59:41 AM	H2 MFC set to  0.000000
9/11/2012	8:59:41 AM	BCl3 MFC set to  0.000000
9/11/2012	8:59:41 AM	PH3 MFC set to  0.000000
9/11/2012	8:59:41 AM	SiCl4 MFC set to  0.000000
9/11/2012	8:59:41 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	8:59:41 AM	Tube furnace set to 0
9/11/2012	9:00:53 AM	Helium valve closed
9/11/2012	9:00:53 AM	H2 valve closed
9/11/2012	9:00:53 AM	BCl3 valve closed
9/11/2012	9:00:53 AM	PH3 valve closed
9/11/2012	9:00:53 AM	SiCl4 pre valve closed
9/11/2012	9:00:53 AM	SiCl4 post valve closed
9/11/2012	9:00:53 AM	Main Vac valve closed
9/11/2012	9:00:53 AM	Bypass valve closed
9/11/2012	9:00:53 AM	Bubbler valve closed
9/11/2012	9:00:53 AM	Helium MFC set to  0.000000
9/11/2012	9:00:53 AM	H2 MFC set to  0.000000
9/11/2012	9:00:53 AM	BCl3 MFC set to  0.000000
9/11/2012	9:00:53 AM	PH3 MFC set to  0.000000
9/11/2012	9:00:53 AM	SiCl4 MFC set to  0.000000
9/11/2012	9:00:53 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	9:00:54 AM	Tube furnace set to 0
9/11/2012	9:00:55 AM	Run finished at 9:00 AM
9/11/2012	9:00:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2012	9:02:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/11/2012	9:02:43 AM	Recipe started at 9:02 AM
9/11/2012	9:02:43 AM	Helium valve closed
9/11/2012	9:02:43 AM	H2 valve closed
9/11/2012	9:02:43 AM	BCl3 valve closed
9/11/2012	9:02:43 AM	PH3 valve closed
9/11/2012	9:02:43 AM	SiCl4 pre valve closed
9/11/2012	9:02:43 AM	SiCl4 post valve closed
9/11/2012	9:02:43 AM	Main Vac valve closed
9/11/2012	9:02:43 AM	Bubbler valve closed
9/11/2012	9:02:43 AM	Bypass valve opened
9/11/2012	9:02:43 AM	Helium MFC set to  0.000000
9/11/2012	9:02:43 AM	H2 MFC set to  0.000000
9/11/2012	9:02:43 AM	BCl3 MFC set to  0.000000
9/11/2012	9:02:43 AM	PH3 MFC set to  0.000000
9/11/2012	9:02:43 AM	SiCl4 MFC set to  0.000000
9/11/2012	9:02:43 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	9:02:43 AM	Tube furnace set to 0
9/11/2012	9:03:58 AM	Helium valve closed
9/11/2012	9:03:58 AM	H2 valve closed
9/11/2012	9:03:58 AM	BCl3 valve closed
9/11/2012	9:03:58 AM	PH3 valve closed
9/11/2012	9:03:58 AM	SiCl4 pre valve closed
9/11/2012	9:03:58 AM	SiCl4 post valve closed
9/11/2012	9:03:58 AM	Main Vac valve closed
9/11/2012	9:03:58 AM	Bubbler valve closed
9/11/2012	9:03:58 AM	Bypass valve opened
9/11/2012	9:03:58 AM	Helium MFC set to  0.000000
9/11/2012	9:03:58 AM	H2 MFC set to  0.000000
9/11/2012	9:03:58 AM	BCl3 MFC set to  0.000000
9/11/2012	9:03:58 AM	PH3 MFC set to  0.000000
9/11/2012	9:03:58 AM	SiCl4 MFC set to  0.000000
9/11/2012	9:03:58 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	9:03:58 AM	Tube furnace set to 0
9/11/2012	9:04:58 AM	Helium valve closed
9/11/2012	9:04:58 AM	H2 valve closed
9/11/2012	9:04:58 AM	BCl3 valve closed
9/11/2012	9:04:58 AM	PH3 valve closed
9/11/2012	9:04:58 AM	SiCl4 pre valve closed
9/11/2012	9:04:58 AM	SiCl4 post valve closed
9/11/2012	9:04:58 AM	Bypass valve closed
9/11/2012	9:04:58 AM	Bubbler valve closed
9/11/2012	9:04:58 AM	Main Vac valve opened
9/11/2012	9:04:58 AM	Helium MFC set to  0.000000
9/11/2012	9:04:58 AM	H2 MFC set to  0.000000
9/11/2012	9:04:58 AM	BCl3 MFC set to  0.000000
9/11/2012	9:04:58 AM	PH3 MFC set to  0.000000
9/11/2012	9:04:58 AM	SiCl4 MFC set to  0.000000
9/11/2012	9:04:58 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	9:04:58 AM	Tube furnace set to 0
9/11/2012	9:04:59 AM	Run finished at 9:04 AM
9/11/2012	9:04:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/11/2012	10:24:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2012	10:24:04 AM	Recipe started at 10:24 AM
9/11/2012	10:24:04 AM	Helium valve closed
9/11/2012	10:24:04 AM	H2 valve closed
9/11/2012	10:24:04 AM	BCl3 valve closed
9/11/2012	10:24:04 AM	PH3 valve closed
9/11/2012	10:24:04 AM	SiCl4 pre valve closed
9/11/2012	10:24:04 AM	SiCl4 post valve closed
9/11/2012	10:24:04 AM	Main Vac valve closed
9/11/2012	10:24:04 AM	Bypass valve closed
9/11/2012	10:24:04 AM	Bubbler valve closed
9/11/2012	10:24:04 AM	Helium MFC set to  0.000000
9/11/2012	10:24:04 AM	H2 MFC set to  0.000000
9/11/2012	10:24:04 AM	BCl3 MFC set to  0.000000
9/11/2012	10:24:04 AM	PH3 MFC set to  0.000000
9/11/2012	10:24:04 AM	SiCl4 MFC set to  0.000000
9/11/2012	10:24:04 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	10:24:04 AM	Tube furnace set to 0
9/11/2012	10:24:07 AM	H2 valve closed
9/11/2012	10:24:07 AM	BCl3 valve closed
9/11/2012	10:24:07 AM	PH3 valve closed
9/11/2012	10:24:07 AM	SiCl4 pre valve closed
9/11/2012	10:24:07 AM	SiCl4 post valve closed
9/11/2012	10:24:07 AM	Main Vac valve closed
9/11/2012	10:24:07 AM	Bypass valve closed
9/11/2012	10:24:07 AM	Bubbler valve closed
9/11/2012	10:24:07 AM	Helium valve opened
9/11/2012	10:24:07 AM	Helium MFC set to  500.000000
9/11/2012	10:24:07 AM	H2 MFC set to  0.000000
9/11/2012	10:24:07 AM	BCl3 MFC set to  0.000000
9/11/2012	10:24:07 AM	PH3 MFC set to  0.000000
9/11/2012	10:24:07 AM	SiCl4 MFC set to  0.000000
9/11/2012	10:24:07 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	10:24:07 AM	Tube furnace set to 0
9/11/2012	10:25:20 AM	Helium valve closed
9/11/2012	10:25:20 AM	H2 valve closed
9/11/2012	10:25:20 AM	BCl3 valve closed
9/11/2012	10:25:20 AM	PH3 valve closed
9/11/2012	10:25:20 AM	SiCl4 pre valve closed
9/11/2012	10:25:20 AM	SiCl4 post valve closed
9/11/2012	10:25:20 AM	Main Vac valve closed
9/11/2012	10:25:20 AM	Bypass valve closed
9/11/2012	10:25:20 AM	Bubbler valve closed
9/11/2012	10:25:20 AM	Helium MFC set to  0.000000
9/11/2012	10:25:20 AM	H2 MFC set to  0.000000
9/11/2012	10:25:20 AM	BCl3 MFC set to  0.000000
9/11/2012	10:25:20 AM	PH3 MFC set to  0.000000
9/11/2012	10:25:20 AM	SiCl4 MFC set to  0.000000
9/11/2012	10:25:20 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	10:25:20 AM	Tube furnace set to 0
9/11/2012	10:25:21 AM	Run finished at 10:25 AM
9/11/2012	10:25:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2012	10:27:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/11/2012	10:27:18 AM	Recipe started at 10:27 AM
9/11/2012	10:27:18 AM	Helium valve closed
9/11/2012	10:27:18 AM	H2 valve closed
9/11/2012	10:27:18 AM	BCl3 valve closed
9/11/2012	10:27:18 AM	PH3 valve closed
9/11/2012	10:27:18 AM	SiCl4 pre valve closed
9/11/2012	10:27:18 AM	SiCl4 post valve closed
9/11/2012	10:27:18 AM	Main Vac valve closed
9/11/2012	10:27:18 AM	Bubbler valve closed
9/11/2012	10:27:18 AM	Bypass valve opened
9/11/2012	10:27:18 AM	Helium MFC set to  0.000000
9/11/2012	10:27:18 AM	H2 MFC set to  0.000000
9/11/2012	10:27:18 AM	BCl3 MFC set to  0.000000
9/11/2012	10:27:18 AM	PH3 MFC set to  0.000000
9/11/2012	10:27:18 AM	SiCl4 MFC set to  0.000000
9/11/2012	10:27:18 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	10:27:18 AM	Tube furnace set to 0
9/11/2012	10:28:34 AM	Helium valve closed
9/11/2012	10:28:34 AM	H2 valve closed
9/11/2012	10:28:34 AM	BCl3 valve closed
9/11/2012	10:28:35 AM	PH3 valve closed
9/11/2012	10:28:35 AM	SiCl4 pre valve closed
9/11/2012	10:28:35 AM	SiCl4 post valve closed
9/11/2012	10:28:35 AM	Main Vac valve closed
9/11/2012	10:28:35 AM	Bubbler valve closed
9/11/2012	10:28:35 AM	Bypass valve opened
9/11/2012	10:28:35 AM	Helium MFC set to  0.000000
9/11/2012	10:28:35 AM	H2 MFC set to  0.000000
9/11/2012	10:28:35 AM	BCl3 MFC set to  0.000000
9/11/2012	10:28:35 AM	PH3 MFC set to  0.000000
9/11/2012	10:28:35 AM	SiCl4 MFC set to  0.000000
9/11/2012	10:28:35 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	10:28:35 AM	Tube furnace set to 0
9/11/2012	10:29:35 AM	Helium valve closed
9/11/2012	10:29:35 AM	H2 valve closed
9/11/2012	10:29:35 AM	BCl3 valve closed
9/11/2012	10:29:35 AM	PH3 valve closed
9/11/2012	10:29:35 AM	SiCl4 pre valve closed
9/11/2012	10:29:35 AM	SiCl4 post valve closed
9/11/2012	10:29:35 AM	Bypass valve closed
9/11/2012	10:29:35 AM	Bubbler valve closed
9/11/2012	10:29:35 AM	Main Vac valve opened
9/11/2012	10:29:35 AM	Helium MFC set to  0.000000
9/11/2012	10:29:35 AM	H2 MFC set to  0.000000
9/11/2012	10:29:35 AM	BCl3 MFC set to  0.000000
9/11/2012	10:29:35 AM	PH3 MFC set to  0.000000
9/11/2012	10:29:35 AM	SiCl4 MFC set to  0.000000
9/11/2012	10:29:35 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	10:29:35 AM	Tube furnace set to 0
9/11/2012	10:29:36 AM	Run finished at 10:29 AM
9/11/2012	10:29:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/11/2012	10:30:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2012	10:30:38 AM	Recipe started at 10:30 AM
9/11/2012	10:30:38 AM	Helium valve closed
9/11/2012	10:30:38 AM	H2 valve closed
9/11/2012	10:30:38 AM	BCl3 valve closed
9/11/2012	10:30:38 AM	PH3 valve closed
9/11/2012	10:30:38 AM	SiCl4 pre valve closed
9/11/2012	10:30:38 AM	SiCl4 post valve closed
9/11/2012	10:30:38 AM	Main Vac valve closed
9/11/2012	10:30:38 AM	Bypass valve closed
9/11/2012	10:30:38 AM	Bubbler valve closed
9/11/2012	10:30:38 AM	Helium MFC set to  0.000000
9/11/2012	10:30:38 AM	H2 MFC set to  0.000000
9/11/2012	10:30:38 AM	BCl3 MFC set to  0.000000
9/11/2012	10:30:38 AM	PH3 MFC set to  0.000000
9/11/2012	10:30:38 AM	SiCl4 MFC set to  0.000000
9/11/2012	10:30:38 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	10:30:38 AM	Tube furnace set to 0
9/11/2012	10:30:41 AM	H2 valve closed
9/11/2012	10:30:41 AM	BCl3 valve closed
9/11/2012	10:30:41 AM	PH3 valve closed
9/11/2012	10:30:41 AM	SiCl4 pre valve closed
9/11/2012	10:30:41 AM	SiCl4 post valve closed
9/11/2012	10:30:41 AM	Main Vac valve closed
9/11/2012	10:30:41 AM	Bypass valve closed
9/11/2012	10:30:41 AM	Bubbler valve closed
9/11/2012	10:30:41 AM	Helium valve opened
9/11/2012	10:30:41 AM	Helium MFC set to  500.000000
9/11/2012	10:30:41 AM	H2 MFC set to  0.000000
9/11/2012	10:30:41 AM	BCl3 MFC set to  0.000000
9/11/2012	10:30:41 AM	PH3 MFC set to  0.000000
9/11/2012	10:30:41 AM	SiCl4 MFC set to  0.000000
9/11/2012	10:30:41 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	10:30:41 AM	Tube furnace set to 0
9/11/2012	10:31:54 AM	Helium valve closed
9/11/2012	10:31:54 AM	H2 valve closed
9/11/2012	10:31:54 AM	BCl3 valve closed
9/11/2012	10:31:54 AM	PH3 valve closed
9/11/2012	10:31:54 AM	SiCl4 pre valve closed
9/11/2012	10:31:54 AM	SiCl4 post valve closed
9/11/2012	10:31:54 AM	Main Vac valve closed
9/11/2012	10:31:54 AM	Bypass valve closed
9/11/2012	10:31:54 AM	Bubbler valve closed
9/11/2012	10:31:54 AM	Helium MFC set to  0.000000
9/11/2012	10:31:54 AM	H2 MFC set to  0.000000
9/11/2012	10:31:54 AM	BCl3 MFC set to  0.000000
9/11/2012	10:31:55 AM	PH3 MFC set to  0.000000
9/11/2012	10:31:55 AM	SiCl4 MFC set to  0.000000
9/11/2012	10:31:55 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	10:31:55 AM	Tube furnace set to 0
9/11/2012	10:31:56 AM	Run finished at 10:31 AM
9/11/2012	10:31:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2012	10:34:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/11/2012	10:34:14 AM	Recipe started at 10:34 AM
9/11/2012	10:34:14 AM	Helium valve closed
9/11/2012	10:34:14 AM	H2 valve closed
9/11/2012	10:34:14 AM	BCl3 valve closed
9/11/2012	10:34:14 AM	PH3 valve closed
9/11/2012	10:34:14 AM	SiCl4 pre valve closed
9/11/2012	10:34:14 AM	SiCl4 post valve closed
9/11/2012	10:34:14 AM	Main Vac valve closed
9/11/2012	10:34:14 AM	Bubbler valve closed
9/11/2012	10:34:14 AM	Bypass valve opened
9/11/2012	10:34:14 AM	Helium MFC set to  0.000000
9/11/2012	10:34:14 AM	H2 MFC set to  0.000000
9/11/2012	10:34:14 AM	BCl3 MFC set to  0.000000
9/11/2012	10:34:14 AM	PH3 MFC set to  0.000000
9/11/2012	10:34:14 AM	SiCl4 MFC set to  0.000000
9/11/2012	10:34:14 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	10:34:14 AM	Tube furnace set to 0
9/11/2012	10:35:31 AM	Helium valve closed
9/11/2012	10:35:31 AM	H2 valve closed
9/11/2012	10:35:31 AM	BCl3 valve closed
9/11/2012	10:35:31 AM	PH3 valve closed
9/11/2012	10:35:31 AM	SiCl4 pre valve closed
9/11/2012	10:35:31 AM	SiCl4 post valve closed
9/11/2012	10:35:31 AM	Main Vac valve closed
9/11/2012	10:35:31 AM	Bubbler valve closed
9/11/2012	10:35:31 AM	Bypass valve opened
9/11/2012	10:35:31 AM	Helium MFC set to  0.000000
9/11/2012	10:35:31 AM	H2 MFC set to  0.000000
9/11/2012	10:35:31 AM	BCl3 MFC set to  0.000000
9/11/2012	10:35:31 AM	PH3 MFC set to  0.000000
9/11/2012	10:35:31 AM	SiCl4 MFC set to  0.000000
9/11/2012	10:35:31 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	10:35:31 AM	Tube furnace set to 0
9/11/2012	10:36:31 AM	Helium valve closed
9/11/2012	10:36:31 AM	H2 valve closed
9/11/2012	10:36:31 AM	BCl3 valve closed
9/11/2012	10:36:31 AM	PH3 valve closed
9/11/2012	10:36:31 AM	SiCl4 pre valve closed
9/11/2012	10:36:31 AM	SiCl4 post valve closed
9/11/2012	10:36:31 AM	Bypass valve closed
9/11/2012	10:36:31 AM	Bubbler valve closed
9/11/2012	10:36:31 AM	Main Vac valve opened
9/11/2012	10:36:31 AM	Helium MFC set to  0.000000
9/11/2012	10:36:31 AM	H2 MFC set to  0.000000
9/11/2012	10:36:31 AM	BCl3 MFC set to  0.000000
9/11/2012	10:36:31 AM	PH3 MFC set to  0.000000
9/11/2012	10:36:31 AM	SiCl4 MFC set to  0.000000
9/11/2012	10:36:31 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	10:36:31 AM	Tube furnace set to 0
9/11/2012	10:36:32 AM	Run finished at 10:36 AM
9/11/2012	10:36:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/11/2012	10:59:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/11/2012	11:00:00 AM	Recipe started at 10:59 AM
9/11/2012	11:00:00 AM	Helium valve closed
9/11/2012	11:00:00 AM	H2 valve closed
9/11/2012	11:00:00 AM	BCl3 valve closed
9/11/2012	11:00:00 AM	PH3 valve closed
9/11/2012	11:00:00 AM	SiCl4 pre valve closed
9/11/2012	11:00:00 AM	SiCl4 post valve closed
9/11/2012	11:00:00 AM	Main Vac valve closed
9/11/2012	11:00:00 AM	Bubbler valve closed
9/11/2012	11:00:00 AM	Bypass valve opened
9/11/2012	11:00:00 AM	Helium MFC set to  0.000000
9/11/2012	11:00:00 AM	H2 MFC set to  0.000000
9/11/2012	11:00:00 AM	BCl3 MFC set to  0.000000
9/11/2012	11:00:00 AM	PH3 MFC set to  0.000000
9/11/2012	11:00:00 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:00:00 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:00:00 AM	Tube furnace set to 0
9/11/2012	11:00:01 AM	Helium valve closed
9/11/2012	11:00:01 AM	H2 valve closed
9/11/2012	11:00:01 AM	BCl3 valve closed
9/11/2012	11:00:01 AM	PH3 valve closed
9/11/2012	11:00:01 AM	SiCl4 pre valve closed
9/11/2012	11:00:01 AM	SiCl4 post valve closed
9/11/2012	11:00:01 AM	Main Vac valve closed
9/11/2012	11:00:01 AM	Bubbler valve closed
9/11/2012	11:00:01 AM	Bypass valve opened
9/11/2012	11:00:01 AM	Helium MFC set to  0.000000
9/11/2012	11:00:01 AM	H2 MFC set to  0.000000
9/11/2012	11:00:01 AM	BCl3 MFC set to  0.000000
9/11/2012	11:00:01 AM	PH3 MFC set to  0.000000
9/11/2012	11:00:01 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:00:01 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:00:01 AM	Tube furnace set to 0
9/11/2012	11:00:06 AM	Helium valve closed
9/11/2012	11:00:06 AM	H2 valve closed
9/11/2012	11:00:06 AM	BCl3 valve closed
9/11/2012	11:00:06 AM	PH3 valve closed
9/11/2012	11:00:06 AM	SiCl4 pre valve closed
9/11/2012	11:00:06 AM	SiCl4 post valve closed
9/11/2012	11:00:06 AM	Bypass valve closed
9/11/2012	11:00:06 AM	Bubbler valve closed
9/11/2012	11:00:06 AM	Main Vac valve opened
9/11/2012	11:00:06 AM	Helium MFC set to  0.000000
9/11/2012	11:00:06 AM	H2 MFC set to  0.000000
9/11/2012	11:00:06 AM	BCl3 MFC set to  0.000000
9/11/2012	11:00:06 AM	PH3 MFC set to  0.000000
9/11/2012	11:00:06 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:00:06 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:00:06 AM	Tube furnace set to 0
9/11/2012	11:00:16 AM	H2 valve closed
9/11/2012	11:00:16 AM	BCl3 valve closed
9/11/2012	11:00:16 AM	PH3 valve closed
9/11/2012	11:00:16 AM	SiCl4 pre valve closed
9/11/2012	11:00:16 AM	SiCl4 post valve closed
9/11/2012	11:00:16 AM	Bypass valve closed
9/11/2012	11:00:16 AM	Bubbler valve closed
9/11/2012	11:00:16 AM	Helium valve opened
9/11/2012	11:00:16 AM	Main Vac valve opened
9/11/2012	11:00:16 AM	Helium MFC set to  20.000000
9/11/2012	11:00:16 AM	H2 MFC set to  0.000000
9/11/2012	11:00:16 AM	BCl3 MFC set to  0.000000
9/11/2012	11:00:16 AM	PH3 MFC set to  0.000000
9/11/2012	11:00:16 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:00:16 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:00:16 AM	Tube furnace set to 0
9/11/2012	11:00:46 AM	Helium valve closed
9/11/2012	11:00:46 AM	H2 valve closed
9/11/2012	11:00:46 AM	BCl3 valve closed
9/11/2012	11:00:46 AM	PH3 valve closed
9/11/2012	11:00:46 AM	SiCl4 pre valve closed
9/11/2012	11:00:46 AM	SiCl4 post valve closed
9/11/2012	11:00:46 AM	Bypass valve closed
9/11/2012	11:00:46 AM	Bubbler valve closed
9/11/2012	11:00:46 AM	Main Vac valve opened
9/11/2012	11:00:46 AM	Helium MFC set to  0.000000
9/11/2012	11:00:46 AM	H2 MFC set to  0.000000
9/11/2012	11:00:46 AM	BCl3 MFC set to  0.000000
9/11/2012	11:00:46 AM	PH3 MFC set to  0.000000
9/11/2012	11:00:46 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:00:46 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:00:46 AM	Tube furnace set to 0
9/11/2012	11:01:16 AM	H2 valve closed
9/11/2012	11:01:16 AM	BCl3 valve closed
9/11/2012	11:01:16 AM	PH3 valve closed
9/11/2012	11:01:16 AM	SiCl4 pre valve closed
9/11/2012	11:01:16 AM	SiCl4 post valve closed
9/11/2012	11:01:16 AM	Bypass valve closed
9/11/2012	11:01:16 AM	Bubbler valve closed
9/11/2012	11:01:16 AM	Helium valve opened
9/11/2012	11:01:16 AM	Main Vac valve opened
9/11/2012	11:01:16 AM	Helium MFC set to  20.000000
9/11/2012	11:01:16 AM	H2 MFC set to  0.000000
9/11/2012	11:01:16 AM	BCl3 MFC set to  0.000000
9/11/2012	11:01:16 AM	PH3 MFC set to  0.000000
9/11/2012	11:01:16 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:01:16 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:01:16 AM	Tube furnace set to 0
9/11/2012	11:01:46 AM	Helium valve closed
9/11/2012	11:01:46 AM	H2 valve closed
9/11/2012	11:01:46 AM	BCl3 valve closed
9/11/2012	11:01:46 AM	PH3 valve closed
9/11/2012	11:01:46 AM	SiCl4 pre valve closed
9/11/2012	11:01:46 AM	SiCl4 post valve closed
9/11/2012	11:01:46 AM	Bypass valve closed
9/11/2012	11:01:46 AM	Bubbler valve closed
9/11/2012	11:01:46 AM	Main Vac valve opened
9/11/2012	11:01:46 AM	Helium MFC set to  0.000000
9/11/2012	11:01:46 AM	H2 MFC set to  0.000000
9/11/2012	11:01:46 AM	BCl3 MFC set to  0.000000
9/11/2012	11:01:46 AM	PH3 MFC set to  0.000000
9/11/2012	11:01:47 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:01:47 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:01:47 AM	Tube furnace set to 0
9/11/2012	11:02:17 AM	H2 valve closed
9/11/2012	11:02:17 AM	BCl3 valve closed
9/11/2012	11:02:17 AM	PH3 valve closed
9/11/2012	11:02:17 AM	SiCl4 pre valve closed
9/11/2012	11:02:17 AM	SiCl4 post valve closed
9/11/2012	11:02:17 AM	Bypass valve closed
9/11/2012	11:02:17 AM	Bubbler valve closed
9/11/2012	11:02:17 AM	Helium valve opened
9/11/2012	11:02:17 AM	Main Vac valve opened
9/11/2012	11:02:17 AM	Helium MFC set to  20.000000
9/11/2012	11:02:17 AM	H2 MFC set to  0.000000
9/11/2012	11:02:17 AM	BCl3 MFC set to  0.000000
9/11/2012	11:02:17 AM	PH3 MFC set to  0.000000
9/11/2012	11:02:17 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:02:17 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:02:17 AM	Tube furnace set to 0
9/11/2012	11:02:47 AM	Helium valve closed
9/11/2012	11:02:47 AM	H2 valve closed
9/11/2012	11:02:47 AM	BCl3 valve closed
9/11/2012	11:02:47 AM	PH3 valve closed
9/11/2012	11:02:47 AM	SiCl4 pre valve closed
9/11/2012	11:02:47 AM	SiCl4 post valve closed
9/11/2012	11:02:47 AM	Bypass valve closed
9/11/2012	11:02:47 AM	Bubbler valve closed
9/11/2012	11:02:47 AM	Main Vac valve opened
9/11/2012	11:02:47 AM	Helium MFC set to  0.000000
9/11/2012	11:02:47 AM	H2 MFC set to  0.000000
9/11/2012	11:02:47 AM	BCl3 MFC set to  0.000000
9/11/2012	11:02:47 AM	PH3 MFC set to  0.000000
9/11/2012	11:02:47 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:02:47 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:02:47 AM	Tube furnace set to 0
9/11/2012	11:03:17 AM	H2 valve closed
9/11/2012	11:03:17 AM	BCl3 valve closed
9/11/2012	11:03:17 AM	PH3 valve closed
9/11/2012	11:03:17 AM	SiCl4 pre valve closed
9/11/2012	11:03:17 AM	SiCl4 post valve closed
9/11/2012	11:03:17 AM	Bypass valve closed
9/11/2012	11:03:17 AM	Bubbler valve closed
9/11/2012	11:03:17 AM	Helium valve opened
9/11/2012	11:03:17 AM	Main Vac valve opened
9/11/2012	11:03:17 AM	Helium MFC set to  20.000000
9/11/2012	11:03:17 AM	H2 MFC set to  0.000000
9/11/2012	11:03:17 AM	BCl3 MFC set to  0.000000
9/11/2012	11:03:17 AM	PH3 MFC set to  0.000000
9/11/2012	11:03:17 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:03:17 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:03:17 AM	Tube furnace set to 0
9/11/2012	11:03:47 AM	Helium valve closed
9/11/2012	11:03:47 AM	H2 valve closed
9/11/2012	11:03:47 AM	BCl3 valve closed
9/11/2012	11:03:47 AM	PH3 valve closed
9/11/2012	11:03:47 AM	SiCl4 pre valve closed
9/11/2012	11:03:47 AM	SiCl4 post valve closed
9/11/2012	11:03:47 AM	Bypass valve closed
9/11/2012	11:03:47 AM	Bubbler valve closed
9/11/2012	11:03:47 AM	Main Vac valve opened
9/11/2012	11:03:47 AM	Helium MFC set to  0.000000
9/11/2012	11:03:47 AM	H2 MFC set to  0.000000
9/11/2012	11:03:47 AM	BCl3 MFC set to  0.000000
9/11/2012	11:03:47 AM	PH3 MFC set to  0.000000
9/11/2012	11:03:47 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:03:47 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:03:48 AM	Tube furnace set to 0
9/11/2012	11:04:18 AM	H2 valve closed
9/11/2012	11:04:18 AM	BCl3 valve closed
9/11/2012	11:04:18 AM	PH3 valve closed
9/11/2012	11:04:18 AM	SiCl4 pre valve closed
9/11/2012	11:04:18 AM	SiCl4 post valve closed
9/11/2012	11:04:18 AM	Bypass valve closed
9/11/2012	11:04:18 AM	Bubbler valve closed
9/11/2012	11:04:18 AM	Helium valve opened
9/11/2012	11:04:18 AM	Main Vac valve opened
9/11/2012	11:04:18 AM	Helium MFC set to  20.000000
9/11/2012	11:04:18 AM	H2 MFC set to  0.000000
9/11/2012	11:04:18 AM	BCl3 MFC set to  0.000000
9/11/2012	11:04:18 AM	PH3 MFC set to  0.000000
9/11/2012	11:04:18 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:04:18 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:04:18 AM	Tube furnace set to 0
9/11/2012	11:04:48 AM	Helium valve closed
9/11/2012	11:04:48 AM	H2 valve closed
9/11/2012	11:04:48 AM	BCl3 valve closed
9/11/2012	11:04:48 AM	PH3 valve closed
9/11/2012	11:04:48 AM	SiCl4 pre valve closed
9/11/2012	11:04:48 AM	SiCl4 post valve closed
9/11/2012	11:04:48 AM	Bypass valve closed
9/11/2012	11:04:48 AM	Bubbler valve closed
9/11/2012	11:04:48 AM	Main Vac valve opened
9/11/2012	11:04:48 AM	Helium MFC set to  0.000000
9/11/2012	11:04:48 AM	H2 MFC set to  0.000000
9/11/2012	11:04:48 AM	BCl3 MFC set to  0.000000
9/11/2012	11:04:48 AM	PH3 MFC set to  0.000000
9/11/2012	11:04:48 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:04:48 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:04:48 AM	Tube furnace set to 0
9/11/2012	11:05:18 AM	H2 valve closed
9/11/2012	11:05:18 AM	BCl3 valve closed
9/11/2012	11:05:18 AM	PH3 valve closed
9/11/2012	11:05:18 AM	SiCl4 pre valve closed
9/11/2012	11:05:18 AM	SiCl4 post valve closed
9/11/2012	11:05:18 AM	Bypass valve closed
9/11/2012	11:05:18 AM	Bubbler valve closed
9/11/2012	11:05:18 AM	Helium valve opened
9/11/2012	11:05:18 AM	Main Vac valve opened
9/11/2012	11:05:18 AM	Helium MFC set to  20.000000
9/11/2012	11:05:18 AM	H2 MFC set to  0.000000
9/11/2012	11:05:18 AM	BCl3 MFC set to  0.000000
9/11/2012	11:05:18 AM	PH3 MFC set to  0.000000
9/11/2012	11:05:18 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:05:18 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:05:18 AM	Tube furnace set to 0
9/11/2012	11:05:48 AM	Helium valve closed
9/11/2012	11:05:48 AM	H2 valve closed
9/11/2012	11:05:48 AM	BCl3 valve closed
9/11/2012	11:05:48 AM	PH3 valve closed
9/11/2012	11:05:48 AM	SiCl4 pre valve closed
9/11/2012	11:05:48 AM	SiCl4 post valve closed
9/11/2012	11:05:48 AM	Bypass valve closed
9/11/2012	11:05:48 AM	Bubbler valve closed
9/11/2012	11:05:48 AM	Main Vac valve opened
9/11/2012	11:05:48 AM	Helium MFC set to  0.000000
9/11/2012	11:05:48 AM	H2 MFC set to  0.000000
9/11/2012	11:05:48 AM	BCl3 MFC set to  0.000000
9/11/2012	11:05:48 AM	PH3 MFC set to  0.000000
9/11/2012	11:05:48 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:05:48 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:05:49 AM	Tube furnace set to 0
9/11/2012	11:06:19 AM	H2 valve closed
9/11/2012	11:06:19 AM	BCl3 valve closed
9/11/2012	11:06:19 AM	PH3 valve closed
9/11/2012	11:06:19 AM	SiCl4 pre valve closed
9/11/2012	11:06:19 AM	SiCl4 post valve closed
9/11/2012	11:06:19 AM	Bypass valve closed
9/11/2012	11:06:19 AM	Bubbler valve closed
9/11/2012	11:06:19 AM	Helium valve opened
9/11/2012	11:06:19 AM	Main Vac valve opened
9/11/2012	11:06:19 AM	Helium MFC set to  20.000000
9/11/2012	11:06:19 AM	H2 MFC set to  0.000000
9/11/2012	11:06:19 AM	BCl3 MFC set to  0.000000
9/11/2012	11:06:19 AM	PH3 MFC set to  0.000000
9/11/2012	11:06:19 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:06:19 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:06:19 AM	Tube furnace set to 0
9/11/2012	11:06:49 AM	Helium valve closed
9/11/2012	11:06:49 AM	H2 valve closed
9/11/2012	11:06:49 AM	BCl3 valve closed
9/11/2012	11:06:49 AM	PH3 valve closed
9/11/2012	11:06:49 AM	SiCl4 pre valve closed
9/11/2012	11:06:49 AM	SiCl4 post valve closed
9/11/2012	11:06:49 AM	Bypass valve closed
9/11/2012	11:06:49 AM	Bubbler valve closed
9/11/2012	11:06:49 AM	Main Vac valve opened
9/11/2012	11:06:49 AM	Helium MFC set to  0.000000
9/11/2012	11:06:49 AM	H2 MFC set to  0.000000
9/11/2012	11:06:49 AM	BCl3 MFC set to  0.000000
9/11/2012	11:06:49 AM	PH3 MFC set to  0.000000
9/11/2012	11:06:49 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:06:49 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:06:49 AM	Tube furnace set to 0
9/11/2012	11:07:19 AM	H2 valve closed
9/11/2012	11:07:19 AM	BCl3 valve closed
9/11/2012	11:07:19 AM	PH3 valve closed
9/11/2012	11:07:19 AM	SiCl4 pre valve closed
9/11/2012	11:07:19 AM	SiCl4 post valve closed
9/11/2012	11:07:19 AM	Bypass valve closed
9/11/2012	11:07:19 AM	Bubbler valve closed
9/11/2012	11:07:19 AM	Helium valve opened
9/11/2012	11:07:19 AM	Main Vac valve opened
9/11/2012	11:07:19 AM	Helium MFC set to  20.000000
9/11/2012	11:07:19 AM	H2 MFC set to  0.000000
9/11/2012	11:07:19 AM	BCl3 MFC set to  0.000000
9/11/2012	11:07:19 AM	PH3 MFC set to  0.000000
9/11/2012	11:07:19 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:07:19 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:07:19 AM	Tube furnace set to 0
9/11/2012	11:07:49 AM	Helium valve closed
9/11/2012	11:07:49 AM	H2 valve closed
9/11/2012	11:07:49 AM	BCl3 valve closed
9/11/2012	11:07:49 AM	PH3 valve closed
9/11/2012	11:07:49 AM	SiCl4 pre valve closed
9/11/2012	11:07:49 AM	SiCl4 post valve closed
9/11/2012	11:07:49 AM	Bypass valve closed
9/11/2012	11:07:49 AM	Bubbler valve closed
9/11/2012	11:07:49 AM	Main Vac valve opened
9/11/2012	11:07:49 AM	Helium MFC set to  0.000000
9/11/2012	11:07:49 AM	H2 MFC set to  0.000000
9/11/2012	11:07:49 AM	BCl3 MFC set to  0.000000
9/11/2012	11:07:49 AM	PH3 MFC set to  0.000000
9/11/2012	11:07:49 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:07:49 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:07:50 AM	Tube furnace set to 0
9/11/2012	11:08:20 AM	H2 valve closed
9/11/2012	11:08:20 AM	BCl3 valve closed
9/11/2012	11:08:20 AM	PH3 valve closed
9/11/2012	11:08:20 AM	SiCl4 pre valve closed
9/11/2012	11:08:20 AM	SiCl4 post valve closed
9/11/2012	11:08:20 AM	Bypass valve closed
9/11/2012	11:08:20 AM	Bubbler valve closed
9/11/2012	11:08:20 AM	Helium valve opened
9/11/2012	11:08:20 AM	Main Vac valve opened
9/11/2012	11:08:20 AM	Helium MFC set to  20.000000
9/11/2012	11:08:20 AM	H2 MFC set to  0.000000
9/11/2012	11:08:20 AM	BCl3 MFC set to  0.000000
9/11/2012	11:08:20 AM	PH3 MFC set to  0.000000
9/11/2012	11:08:20 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:08:20 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:08:20 AM	Tube furnace set to 0
9/11/2012	11:08:50 AM	Helium valve closed
9/11/2012	11:08:50 AM	H2 valve closed
9/11/2012	11:08:50 AM	BCl3 valve closed
9/11/2012	11:08:50 AM	PH3 valve closed
9/11/2012	11:08:50 AM	SiCl4 pre valve closed
9/11/2012	11:08:50 AM	SiCl4 post valve closed
9/11/2012	11:08:50 AM	Bypass valve closed
9/11/2012	11:08:50 AM	Bubbler valve closed
9/11/2012	11:08:50 AM	Main Vac valve opened
9/11/2012	11:08:50 AM	Helium MFC set to  0.000000
9/11/2012	11:08:50 AM	H2 MFC set to  0.000000
9/11/2012	11:08:50 AM	BCl3 MFC set to  0.000000
9/11/2012	11:08:50 AM	PH3 MFC set to  0.000000
9/11/2012	11:08:50 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:08:50 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:08:50 AM	Tube furnace set to 0
9/11/2012	11:09:20 AM	H2 valve closed
9/11/2012	11:09:20 AM	BCl3 valve closed
9/11/2012	11:09:20 AM	PH3 valve closed
9/11/2012	11:09:20 AM	SiCl4 pre valve closed
9/11/2012	11:09:20 AM	SiCl4 post valve closed
9/11/2012	11:09:20 AM	Bypass valve closed
9/11/2012	11:09:20 AM	Bubbler valve closed
9/11/2012	11:09:20 AM	Helium valve opened
9/11/2012	11:09:20 AM	Main Vac valve opened
9/11/2012	11:09:20 AM	Helium MFC set to  20.000000
9/11/2012	11:09:20 AM	H2 MFC set to  0.000000
9/11/2012	11:09:20 AM	BCl3 MFC set to  0.000000
9/11/2012	11:09:20 AM	PH3 MFC set to  0.000000
9/11/2012	11:09:20 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:09:20 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:09:20 AM	Tube furnace set to 0
9/11/2012	11:09:50 AM	Helium valve closed
9/11/2012	11:09:50 AM	H2 valve closed
9/11/2012	11:09:50 AM	BCl3 valve closed
9/11/2012	11:09:50 AM	PH3 valve closed
9/11/2012	11:09:50 AM	SiCl4 pre valve closed
9/11/2012	11:09:50 AM	SiCl4 post valve closed
9/11/2012	11:09:50 AM	Bypass valve closed
9/11/2012	11:09:50 AM	Bubbler valve closed
9/11/2012	11:09:50 AM	Main Vac valve opened
9/11/2012	11:09:50 AM	Helium MFC set to  0.000000
9/11/2012	11:09:50 AM	H2 MFC set to  0.000000
9/11/2012	11:09:50 AM	BCl3 MFC set to  0.000000
9/11/2012	11:09:50 AM	PH3 MFC set to  0.000000
9/11/2012	11:09:50 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:09:50 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:09:51 AM	Tube furnace set to 0
9/11/2012	11:09:52 AM	Run finished at 11:09 AM
9/11/2012	11:09:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/11/2012	11:12:48 AM	Recipe started at 11:12 AM
9/11/2012	11:12:48 AM	Helium valve closed
9/11/2012	11:12:48 AM	H2 valve closed
9/11/2012	11:12:48 AM	BCl3 valve closed
9/11/2012	11:12:48 AM	PH3 valve closed
9/11/2012	11:12:48 AM	SiCl4 pre valve closed
9/11/2012	11:12:48 AM	SiCl4 post valve closed
9/11/2012	11:12:48 AM	Main Vac valve closed
9/11/2012	11:12:48 AM	Bypass valve closed
9/11/2012	11:12:48 AM	Bubbler valve closed
9/11/2012	11:12:48 AM	Helium MFC set to  0.000000
9/11/2012	11:12:48 AM	H2 MFC set to  0.000000
9/11/2012	11:12:48 AM	BCl3 MFC set to  0.000000
9/11/2012	11:12:48 AM	PH3 MFC set to  0.000000
9/11/2012	11:12:48 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:12:48 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:12:49 AM	Tube furnace set to 0
9/11/2012	11:12:52 AM	Helium valve closed
9/11/2012	11:12:52 AM	BCl3 valve closed
9/11/2012	11:12:52 AM	PH3 valve closed
9/11/2012	11:12:52 AM	SiCl4 pre valve closed
9/11/2012	11:12:52 AM	SiCl4 post valve closed
9/11/2012	11:12:52 AM	Main Vac valve closed
9/11/2012	11:12:52 AM	Bypass valve closed
9/11/2012	11:12:52 AM	Bubbler valve closed
9/11/2012	11:12:52 AM	H2 valve opened
9/11/2012	11:12:52 AM	Helium MFC set to  0.000000
9/11/2012	11:12:52 AM	H2 MFC set to  500.000000
9/11/2012	11:12:52 AM	BCl3 MFC set to  0.000000
9/11/2012	11:12:52 AM	PH3 MFC set to  0.000000
9/11/2012	11:12:52 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:12:52 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:12:52 AM	Tube furnace set to 0
9/11/2012	11:14:08 AM	Helium valve closed
9/11/2012	11:14:08 AM	BCl3 valve closed
9/11/2012	11:14:08 AM	PH3 valve closed
9/11/2012	11:14:08 AM	SiCl4 pre valve closed
9/11/2012	11:14:08 AM	SiCl4 post valve closed
9/11/2012	11:14:08 AM	Main Vac valve closed
9/11/2012	11:14:08 AM	Bypass valve closed
9/11/2012	11:14:08 AM	H2 valve opened
9/11/2012	11:14:08 AM	Bubbler valve opened
9/11/2012	11:14:08 AM	Helium MFC set to  0.000000
9/11/2012	11:14:08 AM	H2 MFC set to  500.000000
9/11/2012	11:14:08 AM	BCl3 MFC set to  0.000000
9/11/2012	11:14:08 AM	PH3 MFC set to  0.000000
9/11/2012	11:14:08 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:14:08 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:14:08 AM	Tube furnace set to 0
9/11/2012	11:14:09 AM	Helium valve closed
9/11/2012	11:14:09 AM	BCl3 valve closed
9/11/2012	11:14:09 AM	PH3 valve closed
9/11/2012	11:14:09 AM	SiCl4 pre valve closed
9/11/2012	11:14:09 AM	SiCl4 post valve closed
9/11/2012	11:14:09 AM	Main Vac valve closed
9/11/2012	11:14:09 AM	Bypass valve closed
9/11/2012	11:14:09 AM	H2 valve opened
9/11/2012	11:14:09 AM	Bubbler valve opened
9/11/2012	11:14:09 AM	Helium MFC set to  0.000000
9/11/2012	11:14:09 AM	H2 MFC set to  500.000000
9/11/2012	11:14:09 AM	BCl3 MFC set to  0.000000
9/11/2012	11:14:09 AM	PH3 MFC set to  0.000000
9/11/2012	11:14:09 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:14:09 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:14:10 AM	Tube furnace set to 1000
9/11/2012	11:34:10 AM	Helium valve closed
9/11/2012	11:34:10 AM	PH3 valve closed
9/11/2012	11:34:10 AM	Main Vac valve closed
9/11/2012	11:34:10 AM	Bypass valve closed
9/11/2012	11:34:10 AM	H2 valve opened
9/11/2012	11:34:10 AM	BCl3 valve opened
9/11/2012	11:34:10 AM	SiCl4 pre valve opened
9/11/2012	11:34:10 AM	SiCl4 post valve opened
9/11/2012	11:34:10 AM	Bubbler valve opened
9/11/2012	11:34:10 AM	Helium MFC set to  0.000000
9/11/2012	11:34:10 AM	H2 MFC set to  450.000000
9/11/2012	11:34:10 AM	BCl3 MFC set to  1.300000
9/11/2012	11:34:10 AM	PH3 MFC set to  0.000000
9/11/2012	11:34:10 AM	SiCl4 MFC set to  50.000000
9/11/2012	11:34:10 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:34:10 AM	Tube furnace set to 1000
9/11/2012	11:52:10 AM	Helium valve closed
9/11/2012	11:52:10 AM	BCl3 valve closed
9/11/2012	11:52:10 AM	PH3 valve closed
9/11/2012	11:52:10 AM	SiCl4 pre valve closed
9/11/2012	11:52:10 AM	SiCl4 post valve closed
9/11/2012	11:52:10 AM	Main Vac valve closed
9/11/2012	11:52:10 AM	Bypass valve closed
9/11/2012	11:52:10 AM	H2 valve opened
9/11/2012	11:52:10 AM	Bubbler valve opened
9/11/2012	11:52:10 AM	Helium MFC set to  0.000000
9/11/2012	11:52:10 AM	H2 MFC set to  500.000000
9/11/2012	11:52:10 AM	BCl3 MFC set to  0.000000
9/11/2012	11:52:10 AM	PH3 MFC set to  0.000000
9/11/2012	11:52:10 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:52:10 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:52:10 AM	Tube furnace set to 750
9/11/2012	11:57:10 AM	H2 valve closed
9/11/2012	11:57:10 AM	BCl3 valve closed
9/11/2012	11:57:10 AM	PH3 valve closed
9/11/2012	11:57:10 AM	SiCl4 pre valve closed
9/11/2012	11:57:10 AM	SiCl4 post valve closed
9/11/2012	11:57:10 AM	Main Vac valve closed
9/11/2012	11:57:10 AM	Bypass valve closed
9/11/2012	11:57:10 AM	Helium valve opened
9/11/2012	11:57:10 AM	Bubbler valve opened
9/11/2012	11:57:10 AM	Helium MFC set to  500.000000
9/11/2012	11:57:10 AM	H2 MFC set to  0.000000
9/11/2012	11:57:10 AM	BCl3 MFC set to  0.000000
9/11/2012	11:57:10 AM	PH3 MFC set to  0.000000
9/11/2012	11:57:10 AM	SiCl4 MFC set to  0.000000
9/11/2012	11:57:10 AM	Bypass solenoid MFC set to  0.000000
9/11/2012	11:57:10 AM	Tube furnace set to 0
9/11/2012	12:17:10 PM	Helium valve closed
9/11/2012	12:17:10 PM	H2 valve closed
9/11/2012	12:17:10 PM	BCl3 valve closed
9/11/2012	12:17:10 PM	PH3 valve closed
9/11/2012	12:17:10 PM	SiCl4 pre valve closed
9/11/2012	12:17:10 PM	SiCl4 post valve closed
9/11/2012	12:17:10 PM	Main Vac valve closed
9/11/2012	12:17:10 PM	Bypass valve closed
9/11/2012	12:17:10 PM	Bubbler valve closed
9/11/2012	12:17:10 PM	Helium MFC set to  0.000000
9/11/2012	12:17:10 PM	H2 MFC set to  0.000000
9/11/2012	12:17:10 PM	BCl3 MFC set to  0.000000
9/11/2012	12:17:10 PM	PH3 MFC set to  0.000000
9/11/2012	12:17:10 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:17:10 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:17:10 PM	Tube furnace set to 0
9/11/2012	12:17:11 PM	Run finished at 12:17 PM
9/11/2012	12:22:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2012	12:22:31 PM	Recipe started at 12:22 PM
9/11/2012	12:22:31 PM	Helium valve closed
9/11/2012	12:22:31 PM	H2 valve closed
9/11/2012	12:22:31 PM	BCl3 valve closed
9/11/2012	12:22:31 PM	PH3 valve closed
9/11/2012	12:22:31 PM	SiCl4 pre valve closed
9/11/2012	12:22:31 PM	SiCl4 post valve closed
9/11/2012	12:22:31 PM	Main Vac valve closed
9/11/2012	12:22:31 PM	Bypass valve closed
9/11/2012	12:22:31 PM	Bubbler valve closed
9/11/2012	12:22:31 PM	Helium MFC set to  0.000000
9/11/2012	12:22:31 PM	H2 MFC set to  0.000000
9/11/2012	12:22:31 PM	BCl3 MFC set to  0.000000
9/11/2012	12:22:31 PM	PH3 MFC set to  0.000000
9/11/2012	12:22:31 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:22:31 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:22:31 PM	Tube furnace set to 0
9/11/2012	12:22:34 PM	H2 valve closed
9/11/2012	12:22:34 PM	BCl3 valve closed
9/11/2012	12:22:34 PM	PH3 valve closed
9/11/2012	12:22:34 PM	SiCl4 pre valve closed
9/11/2012	12:22:34 PM	SiCl4 post valve closed
9/11/2012	12:22:34 PM	Main Vac valve closed
9/11/2012	12:22:34 PM	Bypass valve closed
9/11/2012	12:22:34 PM	Bubbler valve closed
9/11/2012	12:22:34 PM	Helium valve opened
9/11/2012	12:22:34 PM	Helium MFC set to  500.000000
9/11/2012	12:22:34 PM	H2 MFC set to  0.000000
9/11/2012	12:22:34 PM	BCl3 MFC set to  0.000000
9/11/2012	12:22:34 PM	PH3 MFC set to  0.000000
9/11/2012	12:22:34 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:22:34 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:22:34 PM	Tube furnace set to 0
9/11/2012	12:22:35 PM	Helium valve closed
9/11/2012	12:22:35 PM	H2 valve closed
9/11/2012	12:22:35 PM	BCl3 valve closed
9/11/2012	12:22:35 PM	PH3 valve closed
9/11/2012	12:22:35 PM	SiCl4 pre valve closed
9/11/2012	12:22:35 PM	SiCl4 post valve closed
9/11/2012	12:22:35 PM	Main Vac valve closed
9/11/2012	12:22:35 PM	Bypass valve closed
9/11/2012	12:22:35 PM	Bubbler valve closed
9/11/2012	12:22:35 PM	Helium MFC set to  0.000000
9/11/2012	12:22:35 PM	H2 MFC set to  0.000000
9/11/2012	12:22:35 PM	BCl3 MFC set to  0.000000
9/11/2012	12:22:35 PM	PH3 MFC set to  0.000000
9/11/2012	12:22:35 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:22:35 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:22:35 PM	Tube furnace set to 0
9/11/2012	12:22:36 PM	Run finished at 12:22 PM
9/11/2012	12:22:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2012	12:29:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/11/2012	12:29:51 PM	Recipe started at 12:29 PM
9/11/2012	12:29:51 PM	Helium valve closed
9/11/2012	12:29:51 PM	H2 valve closed
9/11/2012	12:29:51 PM	BCl3 valve closed
9/11/2012	12:29:51 PM	PH3 valve closed
9/11/2012	12:29:51 PM	SiCl4 pre valve closed
9/11/2012	12:29:51 PM	SiCl4 post valve closed
9/11/2012	12:29:51 PM	Main Vac valve closed
9/11/2012	12:29:51 PM	Bubbler valve closed
9/11/2012	12:29:51 PM	Bypass valve opened
9/11/2012	12:29:51 PM	Helium MFC set to  0.000000
9/11/2012	12:29:51 PM	H2 MFC set to  0.000000
9/11/2012	12:29:51 PM	BCl3 MFC set to  0.000000
9/11/2012	12:29:51 PM	PH3 MFC set to  0.000000
9/11/2012	12:29:51 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:29:51 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:29:51 PM	Tube furnace set to 0
9/11/2012	12:31:15 PM	Helium valve closed
9/11/2012	12:31:15 PM	H2 valve closed
9/11/2012	12:31:15 PM	BCl3 valve closed
9/11/2012	12:31:15 PM	PH3 valve closed
9/11/2012	12:31:15 PM	SiCl4 pre valve closed
9/11/2012	12:31:15 PM	SiCl4 post valve closed
9/11/2012	12:31:15 PM	Main Vac valve closed
9/11/2012	12:31:15 PM	Bubbler valve closed
9/11/2012	12:31:15 PM	Bypass valve opened
9/11/2012	12:31:15 PM	Helium MFC set to  0.000000
9/11/2012	12:31:15 PM	H2 MFC set to  0.000000
9/11/2012	12:31:15 PM	BCl3 MFC set to  0.000000
9/11/2012	12:31:15 PM	PH3 MFC set to  0.000000
9/11/2012	12:31:15 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:31:15 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:31:15 PM	Tube furnace set to 0
9/11/2012	12:32:15 PM	Helium valve closed
9/11/2012	12:32:15 PM	H2 valve closed
9/11/2012	12:32:15 PM	BCl3 valve closed
9/11/2012	12:32:15 PM	PH3 valve closed
9/11/2012	12:32:15 PM	SiCl4 pre valve closed
9/11/2012	12:32:15 PM	SiCl4 post valve closed
9/11/2012	12:32:15 PM	Bypass valve closed
9/11/2012	12:32:15 PM	Bubbler valve closed
9/11/2012	12:32:15 PM	Main Vac valve opened
9/11/2012	12:32:15 PM	Helium MFC set to  0.000000
9/11/2012	12:32:15 PM	H2 MFC set to  0.000000
9/11/2012	12:32:15 PM	BCl3 MFC set to  0.000000
9/11/2012	12:32:15 PM	PH3 MFC set to  0.000000
9/11/2012	12:32:15 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:32:15 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:32:15 PM	Tube furnace set to 0
9/11/2012	12:32:16 PM	Run finished at 12:32 PM
9/11/2012	12:32:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/11/2012	12:54:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/11/2012	12:54:46 PM	Recipe started at 12:54 PM
9/11/2012	12:54:46 PM	Helium valve closed
9/11/2012	12:54:46 PM	H2 valve closed
9/11/2012	12:54:46 PM	BCl3 valve closed
9/11/2012	12:54:46 PM	PH3 valve closed
9/11/2012	12:54:46 PM	SiCl4 pre valve closed
9/11/2012	12:54:46 PM	SiCl4 post valve closed
9/11/2012	12:54:46 PM	Main Vac valve closed
9/11/2012	12:54:46 PM	Bubbler valve closed
9/11/2012	12:54:46 PM	Bypass valve opened
9/11/2012	12:54:46 PM	Helium MFC set to  0.000000
9/11/2012	12:54:46 PM	H2 MFC set to  0.000000
9/11/2012	12:54:46 PM	BCl3 MFC set to  0.000000
9/11/2012	12:54:46 PM	PH3 MFC set to  0.000000
9/11/2012	12:54:46 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:54:46 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:54:46 PM	Tube furnace set to 0
9/11/2012	12:54:46 PM	Helium valve closed
9/11/2012	12:54:46 PM	H2 valve closed
9/11/2012	12:54:46 PM	BCl3 valve closed
9/11/2012	12:54:46 PM	PH3 valve closed
9/11/2012	12:54:46 PM	SiCl4 pre valve closed
9/11/2012	12:54:46 PM	SiCl4 post valve closed
9/11/2012	12:54:46 PM	Main Vac valve closed
9/11/2012	12:54:46 PM	Bubbler valve closed
9/11/2012	12:54:46 PM	Bypass valve opened
9/11/2012	12:54:46 PM	Helium MFC set to  0.000000
9/11/2012	12:54:46 PM	H2 MFC set to  0.000000
9/11/2012	12:54:46 PM	BCl3 MFC set to  0.000000
9/11/2012	12:54:46 PM	PH3 MFC set to  0.000000
9/11/2012	12:54:46 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:54:46 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:54:46 PM	Tube furnace set to 0
9/11/2012	12:54:47 PM	Helium valve closed
9/11/2012	12:54:47 PM	H2 valve closed
9/11/2012	12:54:47 PM	BCl3 valve closed
9/11/2012	12:54:47 PM	PH3 valve closed
9/11/2012	12:54:47 PM	SiCl4 pre valve closed
9/11/2012	12:54:47 PM	SiCl4 post valve closed
9/11/2012	12:54:47 PM	Bypass valve closed
9/11/2012	12:54:47 PM	Bubbler valve closed
9/11/2012	12:54:47 PM	Main Vac valve opened
9/11/2012	12:54:47 PM	Helium MFC set to  0.000000
9/11/2012	12:54:47 PM	H2 MFC set to  0.000000
9/11/2012	12:54:47 PM	BCl3 MFC set to  0.000000
9/11/2012	12:54:47 PM	PH3 MFC set to  0.000000
9/11/2012	12:54:47 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:54:47 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:54:47 PM	Tube furnace set to 0
9/11/2012	12:54:48 PM	H2 valve closed
9/11/2012	12:54:48 PM	BCl3 valve closed
9/11/2012	12:54:48 PM	PH3 valve closed
9/11/2012	12:54:48 PM	SiCl4 pre valve closed
9/11/2012	12:54:48 PM	SiCl4 post valve closed
9/11/2012	12:54:48 PM	Bypass valve closed
9/11/2012	12:54:48 PM	Bubbler valve closed
9/11/2012	12:54:48 PM	Helium valve opened
9/11/2012	12:54:48 PM	Main Vac valve opened
9/11/2012	12:54:48 PM	Helium MFC set to  20.000000
9/11/2012	12:54:48 PM	H2 MFC set to  0.000000
9/11/2012	12:54:48 PM	BCl3 MFC set to  0.000000
9/11/2012	12:54:48 PM	PH3 MFC set to  0.000000
9/11/2012	12:54:48 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:54:48 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:54:48 PM	Tube furnace set to 0
9/11/2012	12:55:18 PM	Helium valve closed
9/11/2012	12:55:18 PM	H2 valve closed
9/11/2012	12:55:18 PM	BCl3 valve closed
9/11/2012	12:55:18 PM	PH3 valve closed
9/11/2012	12:55:18 PM	SiCl4 pre valve closed
9/11/2012	12:55:18 PM	SiCl4 post valve closed
9/11/2012	12:55:18 PM	Bypass valve closed
9/11/2012	12:55:18 PM	Bubbler valve closed
9/11/2012	12:55:18 PM	Main Vac valve opened
9/11/2012	12:55:18 PM	Helium MFC set to  0.000000
9/11/2012	12:55:18 PM	H2 MFC set to  0.000000
9/11/2012	12:55:18 PM	BCl3 MFC set to  0.000000
9/11/2012	12:55:18 PM	PH3 MFC set to  0.000000
9/11/2012	12:55:18 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:55:18 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:55:18 PM	Tube furnace set to 0
9/11/2012	12:55:48 PM	H2 valve closed
9/11/2012	12:55:48 PM	BCl3 valve closed
9/11/2012	12:55:48 PM	PH3 valve closed
9/11/2012	12:55:48 PM	SiCl4 pre valve closed
9/11/2012	12:55:48 PM	SiCl4 post valve closed
9/11/2012	12:55:48 PM	Bypass valve closed
9/11/2012	12:55:48 PM	Bubbler valve closed
9/11/2012	12:55:48 PM	Helium valve opened
9/11/2012	12:55:48 PM	Main Vac valve opened
9/11/2012	12:55:48 PM	Helium MFC set to  20.000000
9/11/2012	12:55:48 PM	H2 MFC set to  0.000000
9/11/2012	12:55:48 PM	BCl3 MFC set to  0.000000
9/11/2012	12:55:48 PM	PH3 MFC set to  0.000000
9/11/2012	12:55:48 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:55:48 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:55:48 PM	Tube furnace set to 0
9/11/2012	12:56:18 PM	Helium valve closed
9/11/2012	12:56:18 PM	H2 valve closed
9/11/2012	12:56:18 PM	BCl3 valve closed
9/11/2012	12:56:18 PM	PH3 valve closed
9/11/2012	12:56:19 PM	SiCl4 pre valve closed
9/11/2012	12:56:19 PM	SiCl4 post valve closed
9/11/2012	12:56:19 PM	Bypass valve closed
9/11/2012	12:56:19 PM	Bubbler valve closed
9/11/2012	12:56:19 PM	Main Vac valve opened
9/11/2012	12:56:19 PM	Helium MFC set to  0.000000
9/11/2012	12:56:19 PM	H2 MFC set to  0.000000
9/11/2012	12:56:19 PM	BCl3 MFC set to  0.000000
9/11/2012	12:56:19 PM	PH3 MFC set to  0.000000
9/11/2012	12:56:19 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:56:19 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:56:19 PM	Tube furnace set to 0
9/11/2012	12:56:49 PM	H2 valve closed
9/11/2012	12:56:49 PM	BCl3 valve closed
9/11/2012	12:56:49 PM	PH3 valve closed
9/11/2012	12:56:49 PM	SiCl4 pre valve closed
9/11/2012	12:56:49 PM	SiCl4 post valve closed
9/11/2012	12:56:49 PM	Bypass valve closed
9/11/2012	12:56:49 PM	Bubbler valve closed
9/11/2012	12:56:49 PM	Helium valve opened
9/11/2012	12:56:49 PM	Main Vac valve opened
9/11/2012	12:56:49 PM	Helium MFC set to  20.000000
9/11/2012	12:56:49 PM	H2 MFC set to  0.000000
9/11/2012	12:56:49 PM	BCl3 MFC set to  0.000000
9/11/2012	12:56:49 PM	PH3 MFC set to  0.000000
9/11/2012	12:56:49 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:56:49 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:56:49 PM	Tube furnace set to 0
9/11/2012	12:57:19 PM	Helium valve closed
9/11/2012	12:57:19 PM	H2 valve closed
9/11/2012	12:57:19 PM	BCl3 valve closed
9/11/2012	12:57:19 PM	PH3 valve closed
9/11/2012	12:57:19 PM	SiCl4 pre valve closed
9/11/2012	12:57:19 PM	SiCl4 post valve closed
9/11/2012	12:57:19 PM	Bypass valve closed
9/11/2012	12:57:19 PM	Bubbler valve closed
9/11/2012	12:57:19 PM	Main Vac valve opened
9/11/2012	12:57:19 PM	Helium MFC set to  0.000000
9/11/2012	12:57:19 PM	H2 MFC set to  0.000000
9/11/2012	12:57:19 PM	BCl3 MFC set to  0.000000
9/11/2012	12:57:19 PM	PH3 MFC set to  0.000000
9/11/2012	12:57:19 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:57:19 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:57:19 PM	Tube furnace set to 0
9/11/2012	12:57:49 PM	H2 valve closed
9/11/2012	12:57:49 PM	BCl3 valve closed
9/11/2012	12:57:49 PM	PH3 valve closed
9/11/2012	12:57:49 PM	SiCl4 pre valve closed
9/11/2012	12:57:49 PM	SiCl4 post valve closed
9/11/2012	12:57:49 PM	Bypass valve closed
9/11/2012	12:57:49 PM	Bubbler valve closed
9/11/2012	12:57:49 PM	Helium valve opened
9/11/2012	12:57:49 PM	Main Vac valve opened
9/11/2012	12:57:49 PM	Helium MFC set to  20.000000
9/11/2012	12:57:49 PM	H2 MFC set to  0.000000
9/11/2012	12:57:49 PM	BCl3 MFC set to  0.000000
9/11/2012	12:57:49 PM	PH3 MFC set to  0.000000
9/11/2012	12:57:49 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:57:49 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:57:49 PM	Tube furnace set to 0
9/11/2012	12:58:19 PM	Helium valve closed
9/11/2012	12:58:19 PM	H2 valve closed
9/11/2012	12:58:19 PM	BCl3 valve closed
9/11/2012	12:58:19 PM	PH3 valve closed
9/11/2012	12:58:19 PM	SiCl4 pre valve closed
9/11/2012	12:58:19 PM	SiCl4 post valve closed
9/11/2012	12:58:19 PM	Bypass valve closed
9/11/2012	12:58:19 PM	Bubbler valve closed
9/11/2012	12:58:19 PM	Main Vac valve opened
9/11/2012	12:58:19 PM	Helium MFC set to  0.000000
9/11/2012	12:58:20 PM	H2 MFC set to  0.000000
9/11/2012	12:58:20 PM	BCl3 MFC set to  0.000000
9/11/2012	12:58:20 PM	PH3 MFC set to  0.000000
9/11/2012	12:58:20 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:58:20 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:58:20 PM	Tube furnace set to 0
9/11/2012	12:58:50 PM	H2 valve closed
9/11/2012	12:58:50 PM	BCl3 valve closed
9/11/2012	12:58:50 PM	PH3 valve closed
9/11/2012	12:58:50 PM	SiCl4 pre valve closed
9/11/2012	12:58:50 PM	SiCl4 post valve closed
9/11/2012	12:58:50 PM	Bypass valve closed
9/11/2012	12:58:50 PM	Bubbler valve closed
9/11/2012	12:58:50 PM	Helium valve opened
9/11/2012	12:58:50 PM	Main Vac valve opened
9/11/2012	12:58:50 PM	Helium MFC set to  20.000000
9/11/2012	12:58:50 PM	H2 MFC set to  0.000000
9/11/2012	12:58:50 PM	BCl3 MFC set to  0.000000
9/11/2012	12:58:50 PM	PH3 MFC set to  0.000000
9/11/2012	12:58:50 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:58:50 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:58:50 PM	Tube furnace set to 0
9/11/2012	12:59:20 PM	Helium valve closed
9/11/2012	12:59:20 PM	H2 valve closed
9/11/2012	12:59:20 PM	BCl3 valve closed
9/11/2012	12:59:20 PM	PH3 valve closed
9/11/2012	12:59:20 PM	SiCl4 pre valve closed
9/11/2012	12:59:20 PM	SiCl4 post valve closed
9/11/2012	12:59:20 PM	Bypass valve closed
9/11/2012	12:59:20 PM	Bubbler valve closed
9/11/2012	12:59:20 PM	Main Vac valve opened
9/11/2012	12:59:20 PM	Helium MFC set to  0.000000
9/11/2012	12:59:20 PM	H2 MFC set to  0.000000
9/11/2012	12:59:20 PM	BCl3 MFC set to  0.000000
9/11/2012	12:59:20 PM	PH3 MFC set to  0.000000
9/11/2012	12:59:20 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:59:20 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:59:20 PM	Tube furnace set to 0
9/11/2012	12:59:50 PM	H2 valve closed
9/11/2012	12:59:50 PM	BCl3 valve closed
9/11/2012	12:59:50 PM	PH3 valve closed
9/11/2012	12:59:50 PM	SiCl4 pre valve closed
9/11/2012	12:59:50 PM	SiCl4 post valve closed
9/11/2012	12:59:50 PM	Bypass valve closed
9/11/2012	12:59:50 PM	Bubbler valve closed
9/11/2012	12:59:50 PM	Helium valve opened
9/11/2012	12:59:50 PM	Main Vac valve opened
9/11/2012	12:59:50 PM	Helium MFC set to  20.000000
9/11/2012	12:59:50 PM	H2 MFC set to  0.000000
9/11/2012	12:59:50 PM	BCl3 MFC set to  0.000000
9/11/2012	12:59:50 PM	PH3 MFC set to  0.000000
9/11/2012	12:59:50 PM	SiCl4 MFC set to  0.000000
9/11/2012	12:59:50 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	12:59:50 PM	Tube furnace set to 0
9/11/2012	1:00:20 PM	Helium valve closed
9/11/2012	1:00:20 PM	H2 valve closed
9/11/2012	1:00:20 PM	BCl3 valve closed
9/11/2012	1:00:20 PM	PH3 valve closed
9/11/2012	1:00:20 PM	SiCl4 pre valve closed
9/11/2012	1:00:20 PM	SiCl4 post valve closed
9/11/2012	1:00:20 PM	Bypass valve closed
9/11/2012	1:00:20 PM	Bubbler valve closed
9/11/2012	1:00:20 PM	Main Vac valve opened
9/11/2012	1:00:20 PM	Helium MFC set to  0.000000
9/11/2012	1:00:20 PM	H2 MFC set to  0.000000
9/11/2012	1:00:20 PM	BCl3 MFC set to  0.000000
9/11/2012	1:00:20 PM	PH3 MFC set to  0.000000
9/11/2012	1:00:20 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:00:21 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:00:21 PM	Tube furnace set to 0
9/11/2012	1:00:51 PM	H2 valve closed
9/11/2012	1:00:51 PM	BCl3 valve closed
9/11/2012	1:00:51 PM	PH3 valve closed
9/11/2012	1:00:51 PM	SiCl4 pre valve closed
9/11/2012	1:00:51 PM	SiCl4 post valve closed
9/11/2012	1:00:51 PM	Bypass valve closed
9/11/2012	1:00:51 PM	Bubbler valve closed
9/11/2012	1:00:51 PM	Helium valve opened
9/11/2012	1:00:51 PM	Main Vac valve opened
9/11/2012	1:00:51 PM	Helium MFC set to  20.000000
9/11/2012	1:00:51 PM	H2 MFC set to  0.000000
9/11/2012	1:00:51 PM	BCl3 MFC set to  0.000000
9/11/2012	1:00:51 PM	PH3 MFC set to  0.000000
9/11/2012	1:00:51 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:00:51 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:00:51 PM	Tube furnace set to 0
9/11/2012	1:01:21 PM	Helium valve closed
9/11/2012	1:01:21 PM	H2 valve closed
9/11/2012	1:01:21 PM	BCl3 valve closed
9/11/2012	1:01:21 PM	PH3 valve closed
9/11/2012	1:01:21 PM	SiCl4 pre valve closed
9/11/2012	1:01:21 PM	SiCl4 post valve closed
9/11/2012	1:01:21 PM	Bypass valve closed
9/11/2012	1:01:21 PM	Bubbler valve closed
9/11/2012	1:01:21 PM	Main Vac valve opened
9/11/2012	1:01:21 PM	Helium MFC set to  0.000000
9/11/2012	1:01:21 PM	H2 MFC set to  0.000000
9/11/2012	1:01:21 PM	BCl3 MFC set to  0.000000
9/11/2012	1:01:21 PM	PH3 MFC set to  0.000000
9/11/2012	1:01:21 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:01:21 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:01:21 PM	Tube furnace set to 0
9/11/2012	1:01:51 PM	H2 valve closed
9/11/2012	1:01:51 PM	BCl3 valve closed
9/11/2012	1:01:51 PM	PH3 valve closed
9/11/2012	1:01:51 PM	SiCl4 pre valve closed
9/11/2012	1:01:51 PM	SiCl4 post valve closed
9/11/2012	1:01:51 PM	Bypass valve closed
9/11/2012	1:01:51 PM	Bubbler valve closed
9/11/2012	1:01:51 PM	Helium valve opened
9/11/2012	1:01:51 PM	Main Vac valve opened
9/11/2012	1:01:51 PM	Helium MFC set to  20.000000
9/11/2012	1:01:51 PM	H2 MFC set to  0.000000
9/11/2012	1:01:51 PM	BCl3 MFC set to  0.000000
9/11/2012	1:01:51 PM	PH3 MFC set to  0.000000
9/11/2012	1:01:51 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:01:51 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:01:51 PM	Tube furnace set to 0
9/11/2012	1:02:21 PM	Helium valve closed
9/11/2012	1:02:21 PM	H2 valve closed
9/11/2012	1:02:21 PM	BCl3 valve closed
9/11/2012	1:02:21 PM	PH3 valve closed
9/11/2012	1:02:21 PM	SiCl4 pre valve closed
9/11/2012	1:02:21 PM	SiCl4 post valve closed
9/11/2012	1:02:21 PM	Bypass valve closed
9/11/2012	1:02:21 PM	Bubbler valve closed
9/11/2012	1:02:21 PM	Main Vac valve opened
9/11/2012	1:02:21 PM	Helium MFC set to  0.000000
9/11/2012	1:02:21 PM	H2 MFC set to  0.000000
9/11/2012	1:02:21 PM	BCl3 MFC set to  0.000000
9/11/2012	1:02:21 PM	PH3 MFC set to  0.000000
9/11/2012	1:02:21 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:02:21 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:02:22 PM	Tube furnace set to 0
9/11/2012	1:02:52 PM	H2 valve closed
9/11/2012	1:02:52 PM	BCl3 valve closed
9/11/2012	1:02:52 PM	PH3 valve closed
9/11/2012	1:02:52 PM	SiCl4 pre valve closed
9/11/2012	1:02:52 PM	SiCl4 post valve closed
9/11/2012	1:02:52 PM	Bypass valve closed
9/11/2012	1:02:52 PM	Bubbler valve closed
9/11/2012	1:02:52 PM	Helium valve opened
9/11/2012	1:02:52 PM	Main Vac valve opened
9/11/2012	1:02:52 PM	Helium MFC set to  20.000000
9/11/2012	1:02:52 PM	H2 MFC set to  0.000000
9/11/2012	1:02:52 PM	BCl3 MFC set to  0.000000
9/11/2012	1:02:52 PM	PH3 MFC set to  0.000000
9/11/2012	1:02:52 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:02:52 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:02:52 PM	Tube furnace set to 0
9/11/2012	1:03:22 PM	Helium valve closed
9/11/2012	1:03:22 PM	H2 valve closed
9/11/2012	1:03:22 PM	BCl3 valve closed
9/11/2012	1:03:22 PM	PH3 valve closed
9/11/2012	1:03:22 PM	SiCl4 pre valve closed
9/11/2012	1:03:22 PM	SiCl4 post valve closed
9/11/2012	1:03:22 PM	Bypass valve closed
9/11/2012	1:03:22 PM	Bubbler valve closed
9/11/2012	1:03:22 PM	Main Vac valve opened
9/11/2012	1:03:22 PM	Helium MFC set to  0.000000
9/11/2012	1:03:22 PM	H2 MFC set to  0.000000
9/11/2012	1:03:22 PM	BCl3 MFC set to  0.000000
9/11/2012	1:03:22 PM	PH3 MFC set to  0.000000
9/11/2012	1:03:22 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:03:22 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:03:22 PM	Tube furnace set to 0
9/11/2012	1:03:52 PM	H2 valve closed
9/11/2012	1:03:52 PM	BCl3 valve closed
9/11/2012	1:03:52 PM	PH3 valve closed
9/11/2012	1:03:52 PM	SiCl4 pre valve closed
9/11/2012	1:03:52 PM	SiCl4 post valve closed
9/11/2012	1:03:52 PM	Bypass valve closed
9/11/2012	1:03:52 PM	Bubbler valve closed
9/11/2012	1:03:52 PM	Helium valve opened
9/11/2012	1:03:52 PM	Main Vac valve opened
9/11/2012	1:03:52 PM	Helium MFC set to  20.000000
9/11/2012	1:03:52 PM	H2 MFC set to  0.000000
9/11/2012	1:03:52 PM	BCl3 MFC set to  0.000000
9/11/2012	1:03:52 PM	PH3 MFC set to  0.000000
9/11/2012	1:03:52 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:03:52 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:03:52 PM	Tube furnace set to 0
9/11/2012	1:04:22 PM	Helium valve closed
9/11/2012	1:04:22 PM	H2 valve closed
9/11/2012	1:04:22 PM	BCl3 valve closed
9/11/2012	1:04:22 PM	PH3 valve closed
9/11/2012	1:04:22 PM	SiCl4 pre valve closed
9/11/2012	1:04:22 PM	SiCl4 post valve closed
9/11/2012	1:04:22 PM	Bypass valve closed
9/11/2012	1:04:22 PM	Bubbler valve closed
9/11/2012	1:04:22 PM	Main Vac valve opened
9/11/2012	1:04:22 PM	Helium MFC set to  0.000000
9/11/2012	1:04:22 PM	H2 MFC set to  0.000000
9/11/2012	1:04:22 PM	BCl3 MFC set to  0.000000
9/11/2012	1:04:22 PM	PH3 MFC set to  0.000000
9/11/2012	1:04:22 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:04:22 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:04:23 PM	Tube furnace set to 0
9/11/2012	1:04:24 PM	Run finished at 1:04 PM
9/11/2012	1:04:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/11/2012	1:06:52 PM	Main Vac valve closed
9/11/2012	1:07:05 PM	Main Vac valve opened
9/11/2012	1:08:10 PM	Recipe started at 1:08 PM
9/11/2012	1:08:10 PM	Helium valve closed
9/11/2012	1:08:10 PM	H2 valve closed
9/11/2012	1:08:10 PM	BCl3 valve closed
9/11/2012	1:08:10 PM	PH3 valve closed
9/11/2012	1:08:10 PM	SiCl4 pre valve closed
9/11/2012	1:08:10 PM	SiCl4 post valve closed
9/11/2012	1:08:10 PM	Main Vac valve closed
9/11/2012	1:08:10 PM	Bypass valve closed
9/11/2012	1:08:10 PM	Bubbler valve closed
9/11/2012	1:08:10 PM	Helium MFC set to  0.000000
9/11/2012	1:08:10 PM	H2 MFC set to  0.000000
9/11/2012	1:08:10 PM	BCl3 MFC set to  0.000000
9/11/2012	1:08:10 PM	PH3 MFC set to  0.000000
9/11/2012	1:08:10 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:08:10 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:08:11 PM	Tube furnace set to 0
9/11/2012	1:08:14 PM	Helium valve closed
9/11/2012	1:08:14 PM	BCl3 valve closed
9/11/2012	1:08:14 PM	PH3 valve closed
9/11/2012	1:08:14 PM	SiCl4 pre valve closed
9/11/2012	1:08:14 PM	SiCl4 post valve closed
9/11/2012	1:08:14 PM	Main Vac valve closed
9/11/2012	1:08:14 PM	Bypass valve closed
9/11/2012	1:08:14 PM	Bubbler valve closed
9/11/2012	1:08:14 PM	H2 valve opened
9/11/2012	1:08:14 PM	Helium MFC set to  0.000000
9/11/2012	1:08:14 PM	H2 MFC set to  500.000000
9/11/2012	1:08:14 PM	BCl3 MFC set to  0.000000
9/11/2012	1:08:14 PM	PH3 MFC set to  0.000000
9/11/2012	1:08:14 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:08:14 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:08:14 PM	Tube furnace set to 0
9/11/2012	1:09:30 PM	Helium valve closed
9/11/2012	1:09:30 PM	BCl3 valve closed
9/11/2012	1:09:30 PM	PH3 valve closed
9/11/2012	1:09:30 PM	SiCl4 pre valve closed
9/11/2012	1:09:30 PM	SiCl4 post valve closed
9/11/2012	1:09:30 PM	Main Vac valve closed
9/11/2012	1:09:30 PM	Bypass valve closed
9/11/2012	1:09:30 PM	H2 valve opened
9/11/2012	1:09:30 PM	Bubbler valve opened
9/11/2012	1:09:30 PM	Helium MFC set to  0.000000
9/11/2012	1:09:30 PM	H2 MFC set to  500.000000
9/11/2012	1:09:30 PM	BCl3 MFC set to  0.000000
9/11/2012	1:09:30 PM	PH3 MFC set to  0.000000
9/11/2012	1:09:30 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:09:30 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:09:30 PM	Tube furnace set to 0
9/11/2012	1:09:31 PM	Helium valve closed
9/11/2012	1:09:31 PM	BCl3 valve closed
9/11/2012	1:09:31 PM	PH3 valve closed
9/11/2012	1:09:31 PM	SiCl4 pre valve closed
9/11/2012	1:09:31 PM	SiCl4 post valve closed
9/11/2012	1:09:31 PM	Main Vac valve closed
9/11/2012	1:09:31 PM	Bypass valve closed
9/11/2012	1:09:31 PM	H2 valve opened
9/11/2012	1:09:31 PM	Bubbler valve opened
9/11/2012	1:09:31 PM	Helium MFC set to  0.000000
9/11/2012	1:09:31 PM	H2 MFC set to  500.000000
9/11/2012	1:09:31 PM	BCl3 MFC set to  0.000000
9/11/2012	1:09:31 PM	PH3 MFC set to  0.000000
9/11/2012	1:09:31 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:09:31 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:09:31 PM	Tube furnace set to 1000
9/11/2012	1:29:31 PM	Helium valve closed
9/11/2012	1:29:31 PM	PH3 valve closed
9/11/2012	1:29:31 PM	Main Vac valve closed
9/11/2012	1:29:31 PM	Bypass valve closed
9/11/2012	1:29:31 PM	H2 valve opened
9/11/2012	1:29:31 PM	BCl3 valve opened
9/11/2012	1:29:31 PM	SiCl4 pre valve opened
9/11/2012	1:29:31 PM	SiCl4 post valve opened
9/11/2012	1:29:31 PM	Bubbler valve opened
9/11/2012	1:29:31 PM	Helium MFC set to  0.000000
9/11/2012	1:29:31 PM	H2 MFC set to  450.000000
9/11/2012	1:29:31 PM	BCl3 MFC set to  1.300000
9/11/2012	1:29:31 PM	PH3 MFC set to  0.000000
9/11/2012	1:29:31 PM	SiCl4 MFC set to  50.000000
9/11/2012	1:29:31 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:29:31 PM	Tube furnace set to 1000
9/11/2012	1:46:31 PM	Helium valve closed
9/11/2012	1:46:31 PM	BCl3 valve closed
9/11/2012	1:46:31 PM	PH3 valve closed
9/11/2012	1:46:31 PM	SiCl4 pre valve closed
9/11/2012	1:46:31 PM	SiCl4 post valve closed
9/11/2012	1:46:31 PM	Main Vac valve closed
9/11/2012	1:46:31 PM	Bypass valve closed
9/11/2012	1:46:31 PM	H2 valve opened
9/11/2012	1:46:31 PM	Bubbler valve opened
9/11/2012	1:46:31 PM	Helium MFC set to  0.000000
9/11/2012	1:46:31 PM	H2 MFC set to  500.000000
9/11/2012	1:46:31 PM	BCl3 MFC set to  0.000000
9/11/2012	1:46:31 PM	PH3 MFC set to  0.000000
9/11/2012	1:46:31 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:46:31 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:46:32 PM	Tube furnace set to 750
9/11/2012	1:51:32 PM	H2 valve closed
9/11/2012	1:51:32 PM	BCl3 valve closed
9/11/2012	1:51:32 PM	PH3 valve closed
9/11/2012	1:51:32 PM	SiCl4 pre valve closed
9/11/2012	1:51:32 PM	SiCl4 post valve closed
9/11/2012	1:51:32 PM	Main Vac valve closed
9/11/2012	1:51:32 PM	Bypass valve closed
9/11/2012	1:51:32 PM	Helium valve opened
9/11/2012	1:51:32 PM	Bubbler valve opened
9/11/2012	1:51:32 PM	Helium MFC set to  500.000000
9/11/2012	1:51:32 PM	H2 MFC set to  0.000000
9/11/2012	1:51:32 PM	BCl3 MFC set to  0.000000
9/11/2012	1:51:32 PM	PH3 MFC set to  0.000000
9/11/2012	1:51:32 PM	SiCl4 MFC set to  0.000000
9/11/2012	1:51:32 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	1:51:32 PM	Tube furnace set to 0
9/11/2012	2:03:25 PM	Run aborted at 2:03 PM
9/11/2012	2:03:25 PM	Helium valve closed
9/11/2012	2:03:25 PM	H2 valve closed
9/11/2012	2:03:25 PM	BCl3 valve closed
9/11/2012	2:03:25 PM	PH3 valve closed
9/11/2012	2:03:25 PM	SiCl4 pre valve closed
9/11/2012	2:03:25 PM	SiCl4 post valve closed
9/11/2012	2:03:25 PM	Bypass valve closed
9/11/2012	2:03:25 PM	Main Vac valve closed
9/11/2012	2:03:25 PM	Bubbler valve closed
9/11/2012	2:03:25 PM	Helium MFC set to  0.000000
9/11/2012	2:03:25 PM	H2 MFC set to  0.000000
9/11/2012	2:03:25 PM	BCl3 MFC set to  0.000000
9/11/2012	2:03:25 PM	PH3 MFC set to  0.000000
9/11/2012	2:03:25 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:03:25 PM	Tube furnace set to 0
9/11/2012	2:03:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2012	2:03:29 PM	Recipe started at 2:03 PM
9/11/2012	2:03:29 PM	Helium valve closed
9/11/2012	2:03:29 PM	H2 valve closed
9/11/2012	2:03:29 PM	BCl3 valve closed
9/11/2012	2:03:29 PM	PH3 valve closed
9/11/2012	2:03:29 PM	SiCl4 pre valve closed
9/11/2012	2:03:29 PM	SiCl4 post valve closed
9/11/2012	2:03:29 PM	Main Vac valve closed
9/11/2012	2:03:29 PM	Bypass valve closed
9/11/2012	2:03:29 PM	Bubbler valve closed
9/11/2012	2:03:29 PM	Helium MFC set to  0.000000
9/11/2012	2:03:29 PM	H2 MFC set to  0.000000
9/11/2012	2:03:29 PM	BCl3 MFC set to  0.000000
9/11/2012	2:03:29 PM	PH3 MFC set to  0.000000
9/11/2012	2:03:29 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:03:29 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:03:29 PM	Tube furnace set to 0
9/11/2012	2:03:32 PM	H2 valve closed
9/11/2012	2:03:32 PM	BCl3 valve closed
9/11/2012	2:03:32 PM	PH3 valve closed
9/11/2012	2:03:32 PM	SiCl4 pre valve closed
9/11/2012	2:03:32 PM	SiCl4 post valve closed
9/11/2012	2:03:32 PM	Main Vac valve closed
9/11/2012	2:03:32 PM	Bypass valve closed
9/11/2012	2:03:32 PM	Bubbler valve closed
9/11/2012	2:03:32 PM	Helium valve opened
9/11/2012	2:03:32 PM	Helium MFC set to  500.000000
9/11/2012	2:03:32 PM	H2 MFC set to  0.000000
9/11/2012	2:03:32 PM	BCl3 MFC set to  0.000000
9/11/2012	2:03:32 PM	PH3 MFC set to  0.000000
9/11/2012	2:03:32 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:03:32 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:03:33 PM	Tube furnace set to 0
9/11/2012	2:03:33 PM	Helium valve closed
9/11/2012	2:03:33 PM	H2 valve closed
9/11/2012	2:03:33 PM	BCl3 valve closed
9/11/2012	2:03:33 PM	PH3 valve closed
9/11/2012	2:03:33 PM	SiCl4 pre valve closed
9/11/2012	2:03:33 PM	SiCl4 post valve closed
9/11/2012	2:03:33 PM	Main Vac valve closed
9/11/2012	2:03:33 PM	Bypass valve closed
9/11/2012	2:03:33 PM	Bubbler valve closed
9/11/2012	2:03:33 PM	Helium MFC set to  0.000000
9/11/2012	2:03:33 PM	H2 MFC set to  0.000000
9/11/2012	2:03:33 PM	BCl3 MFC set to  0.000000
9/11/2012	2:03:33 PM	PH3 MFC set to  0.000000
9/11/2012	2:03:33 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:03:33 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:03:33 PM	Tube furnace set to 0
9/11/2012	2:03:34 PM	Run finished at 2:03 PM
9/11/2012	2:03:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2012	2:11:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/11/2012	2:11:15 PM	Recipe started at 2:11 PM
9/11/2012	2:11:15 PM	Helium valve closed
9/11/2012	2:11:15 PM	H2 valve closed
9/11/2012	2:11:15 PM	BCl3 valve closed
9/11/2012	2:11:15 PM	PH3 valve closed
9/11/2012	2:11:15 PM	SiCl4 pre valve closed
9/11/2012	2:11:15 PM	SiCl4 post valve closed
9/11/2012	2:11:15 PM	Main Vac valve closed
9/11/2012	2:11:15 PM	Bubbler valve closed
9/11/2012	2:11:15 PM	Bypass valve opened
9/11/2012	2:11:15 PM	Helium MFC set to  0.000000
9/11/2012	2:11:15 PM	H2 MFC set to  0.000000
9/11/2012	2:11:15 PM	BCl3 MFC set to  0.000000
9/11/2012	2:11:15 PM	PH3 MFC set to  0.000000
9/11/2012	2:11:15 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:11:15 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:11:15 PM	Tube furnace set to 0
9/11/2012	2:12:35 PM	Helium valve closed
9/11/2012	2:12:35 PM	H2 valve closed
9/11/2012	2:12:35 PM	BCl3 valve closed
9/11/2012	2:12:35 PM	PH3 valve closed
9/11/2012	2:12:35 PM	SiCl4 pre valve closed
9/11/2012	2:12:35 PM	SiCl4 post valve closed
9/11/2012	2:12:35 PM	Main Vac valve closed
9/11/2012	2:12:35 PM	Bubbler valve closed
9/11/2012	2:12:35 PM	Bypass valve opened
9/11/2012	2:12:35 PM	Helium MFC set to  0.000000
9/11/2012	2:12:35 PM	H2 MFC set to  0.000000
9/11/2012	2:12:35 PM	BCl3 MFC set to  0.000000
9/11/2012	2:12:35 PM	PH3 MFC set to  0.000000
9/11/2012	2:12:35 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:12:35 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:12:35 PM	Tube furnace set to 0
9/11/2012	2:13:35 PM	Helium valve closed
9/11/2012	2:13:35 PM	H2 valve closed
9/11/2012	2:13:35 PM	BCl3 valve closed
9/11/2012	2:13:35 PM	PH3 valve closed
9/11/2012	2:13:35 PM	SiCl4 pre valve closed
9/11/2012	2:13:35 PM	SiCl4 post valve closed
9/11/2012	2:13:35 PM	Bypass valve closed
9/11/2012	2:13:35 PM	Bubbler valve closed
9/11/2012	2:13:35 PM	Main Vac valve opened
9/11/2012	2:13:35 PM	Helium MFC set to  0.000000
9/11/2012	2:13:35 PM	H2 MFC set to  0.000000
9/11/2012	2:13:35 PM	BCl3 MFC set to  0.000000
9/11/2012	2:13:35 PM	PH3 MFC set to  0.000000
9/11/2012	2:13:35 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:13:35 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:13:36 PM	Tube furnace set to 0
9/11/2012	2:13:37 PM	Run finished at 2:13 PM
9/11/2012	2:13:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/11/2012	2:35:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/11/2012	2:36:12 PM	Recipe started at 2:36 PM
9/11/2012	2:36:12 PM	Helium valve closed
9/11/2012	2:36:12 PM	H2 valve closed
9/11/2012	2:36:12 PM	BCl3 valve closed
9/11/2012	2:36:12 PM	PH3 valve closed
9/11/2012	2:36:12 PM	SiCl4 pre valve closed
9/11/2012	2:36:12 PM	SiCl4 post valve closed
9/11/2012	2:36:12 PM	Main Vac valve closed
9/11/2012	2:36:12 PM	Bubbler valve closed
9/11/2012	2:36:12 PM	Bypass valve opened
9/11/2012	2:36:12 PM	Helium MFC set to  0.000000
9/11/2012	2:36:12 PM	H2 MFC set to  0.000000
9/11/2012	2:36:12 PM	BCl3 MFC set to  0.000000
9/11/2012	2:36:12 PM	PH3 MFC set to  0.000000
9/11/2012	2:36:12 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:36:12 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:36:12 PM	Tube furnace set to 0
9/11/2012	2:36:12 PM	Helium valve closed
9/11/2012	2:36:12 PM	H2 valve closed
9/11/2012	2:36:12 PM	BCl3 valve closed
9/11/2012	2:36:12 PM	PH3 valve closed
9/11/2012	2:36:12 PM	SiCl4 pre valve closed
9/11/2012	2:36:12 PM	SiCl4 post valve closed
9/11/2012	2:36:12 PM	Main Vac valve closed
9/11/2012	2:36:12 PM	Bubbler valve closed
9/11/2012	2:36:12 PM	Bypass valve opened
9/11/2012	2:36:12 PM	Helium MFC set to  0.000000
9/11/2012	2:36:12 PM	H2 MFC set to  0.000000
9/11/2012	2:36:12 PM	BCl3 MFC set to  0.000000
9/11/2012	2:36:12 PM	PH3 MFC set to  0.000000
9/11/2012	2:36:12 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:36:12 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:36:12 PM	Tube furnace set to 0
9/11/2012	2:36:14 PM	Helium valve closed
9/11/2012	2:36:14 PM	H2 valve closed
9/11/2012	2:36:14 PM	BCl3 valve closed
9/11/2012	2:36:14 PM	PH3 valve closed
9/11/2012	2:36:14 PM	SiCl4 pre valve closed
9/11/2012	2:36:14 PM	SiCl4 post valve closed
9/11/2012	2:36:14 PM	Bypass valve closed
9/11/2012	2:36:14 PM	Bubbler valve closed
9/11/2012	2:36:14 PM	Main Vac valve opened
9/11/2012	2:36:14 PM	Helium MFC set to  0.000000
9/11/2012	2:36:14 PM	H2 MFC set to  0.000000
9/11/2012	2:36:15 PM	BCl3 MFC set to  0.000000
9/11/2012	2:36:15 PM	PH3 MFC set to  0.000000
9/11/2012	2:36:15 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:36:15 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:36:15 PM	Tube furnace set to 0
9/11/2012	2:36:15 PM	H2 valve closed
9/11/2012	2:36:15 PM	BCl3 valve closed
9/11/2012	2:36:15 PM	PH3 valve closed
9/11/2012	2:36:15 PM	SiCl4 pre valve closed
9/11/2012	2:36:15 PM	SiCl4 post valve closed
9/11/2012	2:36:15 PM	Bypass valve closed
9/11/2012	2:36:15 PM	Bubbler valve closed
9/11/2012	2:36:15 PM	Helium valve opened
9/11/2012	2:36:15 PM	Main Vac valve opened
9/11/2012	2:36:15 PM	Helium MFC set to  20.000000
9/11/2012	2:36:15 PM	H2 MFC set to  0.000000
9/11/2012	2:36:15 PM	BCl3 MFC set to  0.000000
9/11/2012	2:36:15 PM	PH3 MFC set to  0.000000
9/11/2012	2:36:15 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:36:15 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:36:15 PM	Tube furnace set to 0
9/11/2012	2:36:45 PM	Helium valve closed
9/11/2012	2:36:45 PM	H2 valve closed
9/11/2012	2:36:45 PM	BCl3 valve closed
9/11/2012	2:36:45 PM	PH3 valve closed
9/11/2012	2:36:45 PM	SiCl4 pre valve closed
9/11/2012	2:36:45 PM	SiCl4 post valve closed
9/11/2012	2:36:45 PM	Bypass valve closed
9/11/2012	2:36:45 PM	Bubbler valve closed
9/11/2012	2:36:45 PM	Main Vac valve opened
9/11/2012	2:36:45 PM	Helium MFC set to  0.000000
9/11/2012	2:36:45 PM	H2 MFC set to  0.000000
9/11/2012	2:36:45 PM	BCl3 MFC set to  0.000000
9/11/2012	2:36:45 PM	PH3 MFC set to  0.000000
9/11/2012	2:36:45 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:36:45 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:36:46 PM	Tube furnace set to 0
9/11/2012	2:37:16 PM	H2 valve closed
9/11/2012	2:37:16 PM	BCl3 valve closed
9/11/2012	2:37:16 PM	PH3 valve closed
9/11/2012	2:37:16 PM	SiCl4 pre valve closed
9/11/2012	2:37:16 PM	SiCl4 post valve closed
9/11/2012	2:37:16 PM	Bypass valve closed
9/11/2012	2:37:16 PM	Bubbler valve closed
9/11/2012	2:37:16 PM	Helium valve opened
9/11/2012	2:37:16 PM	Main Vac valve opened
9/11/2012	2:37:16 PM	Helium MFC set to  20.000000
9/11/2012	2:37:16 PM	H2 MFC set to  0.000000
9/11/2012	2:37:16 PM	BCl3 MFC set to  0.000000
9/11/2012	2:37:16 PM	PH3 MFC set to  0.000000
9/11/2012	2:37:16 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:37:16 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:37:16 PM	Tube furnace set to 0
9/11/2012	2:37:46 PM	Helium valve closed
9/11/2012	2:37:46 PM	H2 valve closed
9/11/2012	2:37:46 PM	BCl3 valve closed
9/11/2012	2:37:46 PM	PH3 valve closed
9/11/2012	2:37:46 PM	SiCl4 pre valve closed
9/11/2012	2:37:46 PM	SiCl4 post valve closed
9/11/2012	2:37:46 PM	Bypass valve closed
9/11/2012	2:37:46 PM	Bubbler valve closed
9/11/2012	2:37:46 PM	Main Vac valve opened
9/11/2012	2:37:46 PM	Helium MFC set to  0.000000
9/11/2012	2:37:46 PM	H2 MFC set to  0.000000
9/11/2012	2:37:46 PM	BCl3 MFC set to  0.000000
9/11/2012	2:37:46 PM	PH3 MFC set to  0.000000
9/11/2012	2:37:46 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:37:46 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:37:46 PM	Tube furnace set to 0
9/11/2012	2:38:16 PM	H2 valve closed
9/11/2012	2:38:16 PM	BCl3 valve closed
9/11/2012	2:38:16 PM	PH3 valve closed
9/11/2012	2:38:16 PM	SiCl4 pre valve closed
9/11/2012	2:38:16 PM	SiCl4 post valve closed
9/11/2012	2:38:16 PM	Bypass valve closed
9/11/2012	2:38:16 PM	Bubbler valve closed
9/11/2012	2:38:16 PM	Helium valve opened
9/11/2012	2:38:16 PM	Main Vac valve opened
9/11/2012	2:38:16 PM	Helium MFC set to  20.000000
9/11/2012	2:38:16 PM	H2 MFC set to  0.000000
9/11/2012	2:38:16 PM	BCl3 MFC set to  0.000000
9/11/2012	2:38:16 PM	PH3 MFC set to  0.000000
9/11/2012	2:38:16 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:38:16 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:38:16 PM	Tube furnace set to 0
9/11/2012	2:38:46 PM	Helium valve closed
9/11/2012	2:38:46 PM	H2 valve closed
9/11/2012	2:38:46 PM	BCl3 valve closed
9/11/2012	2:38:46 PM	PH3 valve closed
9/11/2012	2:38:46 PM	SiCl4 pre valve closed
9/11/2012	2:38:46 PM	SiCl4 post valve closed
9/11/2012	2:38:46 PM	Bypass valve closed
9/11/2012	2:38:46 PM	Bubbler valve closed
9/11/2012	2:38:46 PM	Main Vac valve opened
9/11/2012	2:38:46 PM	Helium MFC set to  0.000000
9/11/2012	2:38:46 PM	H2 MFC set to  0.000000
9/11/2012	2:38:46 PM	BCl3 MFC set to  0.000000
9/11/2012	2:38:46 PM	PH3 MFC set to  0.000000
9/11/2012	2:38:46 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:38:46 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:38:47 PM	Tube furnace set to 0
9/11/2012	2:39:17 PM	H2 valve closed
9/11/2012	2:39:17 PM	BCl3 valve closed
9/11/2012	2:39:17 PM	PH3 valve closed
9/11/2012	2:39:17 PM	SiCl4 pre valve closed
9/11/2012	2:39:17 PM	SiCl4 post valve closed
9/11/2012	2:39:17 PM	Bypass valve closed
9/11/2012	2:39:17 PM	Bubbler valve closed
9/11/2012	2:39:17 PM	Helium valve opened
9/11/2012	2:39:17 PM	Main Vac valve opened
9/11/2012	2:39:17 PM	Helium MFC set to  20.000000
9/11/2012	2:39:17 PM	H2 MFC set to  0.000000
9/11/2012	2:39:17 PM	BCl3 MFC set to  0.000000
9/11/2012	2:39:17 PM	PH3 MFC set to  0.000000
9/11/2012	2:39:17 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:39:17 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:39:17 PM	Tube furnace set to 0
9/11/2012	2:39:47 PM	Helium valve closed
9/11/2012	2:39:47 PM	H2 valve closed
9/11/2012	2:39:47 PM	BCl3 valve closed
9/11/2012	2:39:47 PM	PH3 valve closed
9/11/2012	2:39:47 PM	SiCl4 pre valve closed
9/11/2012	2:39:47 PM	SiCl4 post valve closed
9/11/2012	2:39:47 PM	Bypass valve closed
9/11/2012	2:39:47 PM	Bubbler valve closed
9/11/2012	2:39:47 PM	Main Vac valve opened
9/11/2012	2:39:47 PM	Helium MFC set to  0.000000
9/11/2012	2:39:47 PM	H2 MFC set to  0.000000
9/11/2012	2:39:47 PM	BCl3 MFC set to  0.000000
9/11/2012	2:39:47 PM	PH3 MFC set to  0.000000
9/11/2012	2:39:47 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:39:47 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:39:47 PM	Tube furnace set to 0
9/11/2012	2:40:17 PM	H2 valve closed
9/11/2012	2:40:17 PM	BCl3 valve closed
9/11/2012	2:40:17 PM	PH3 valve closed
9/11/2012	2:40:17 PM	SiCl4 pre valve closed
9/11/2012	2:40:17 PM	SiCl4 post valve closed
9/11/2012	2:40:17 PM	Bypass valve closed
9/11/2012	2:40:17 PM	Bubbler valve closed
9/11/2012	2:40:17 PM	Helium valve opened
9/11/2012	2:40:17 PM	Main Vac valve opened
9/11/2012	2:40:17 PM	Helium MFC set to  20.000000
9/11/2012	2:40:17 PM	H2 MFC set to  0.000000
9/11/2012	2:40:17 PM	BCl3 MFC set to  0.000000
9/11/2012	2:40:17 PM	PH3 MFC set to  0.000000
9/11/2012	2:40:17 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:40:17 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:40:17 PM	Tube furnace set to 0
9/11/2012	2:40:47 PM	Helium valve closed
9/11/2012	2:40:47 PM	H2 valve closed
9/11/2012	2:40:47 PM	BCl3 valve closed
9/11/2012	2:40:47 PM	PH3 valve closed
9/11/2012	2:40:47 PM	SiCl4 pre valve closed
9/11/2012	2:40:47 PM	SiCl4 post valve closed
9/11/2012	2:40:47 PM	Bypass valve closed
9/11/2012	2:40:47 PM	Bubbler valve closed
9/11/2012	2:40:47 PM	Main Vac valve opened
9/11/2012	2:40:47 PM	Helium MFC set to  0.000000
9/11/2012	2:40:47 PM	H2 MFC set to  0.000000
9/11/2012	2:40:47 PM	BCl3 MFC set to  0.000000
9/11/2012	2:40:47 PM	PH3 MFC set to  0.000000
9/11/2012	2:40:47 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:40:47 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:40:48 PM	Tube furnace set to 0
9/11/2012	2:41:18 PM	H2 valve closed
9/11/2012	2:41:18 PM	BCl3 valve closed
9/11/2012	2:41:18 PM	PH3 valve closed
9/11/2012	2:41:18 PM	SiCl4 pre valve closed
9/11/2012	2:41:18 PM	SiCl4 post valve closed
9/11/2012	2:41:18 PM	Bypass valve closed
9/11/2012	2:41:18 PM	Bubbler valve closed
9/11/2012	2:41:18 PM	Helium valve opened
9/11/2012	2:41:18 PM	Main Vac valve opened
9/11/2012	2:41:18 PM	Helium MFC set to  20.000000
9/11/2012	2:41:18 PM	H2 MFC set to  0.000000
9/11/2012	2:41:18 PM	BCl3 MFC set to  0.000000
9/11/2012	2:41:18 PM	PH3 MFC set to  0.000000
9/11/2012	2:41:18 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:41:18 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:41:18 PM	Tube furnace set to 0
9/11/2012	2:41:48 PM	Helium valve closed
9/11/2012	2:41:48 PM	H2 valve closed
9/11/2012	2:41:48 PM	BCl3 valve closed
9/11/2012	2:41:48 PM	PH3 valve closed
9/11/2012	2:41:48 PM	SiCl4 pre valve closed
9/11/2012	2:41:48 PM	SiCl4 post valve closed
9/11/2012	2:41:48 PM	Bypass valve closed
9/11/2012	2:41:48 PM	Bubbler valve closed
9/11/2012	2:41:48 PM	Main Vac valve opened
9/11/2012	2:41:48 PM	Helium MFC set to  0.000000
9/11/2012	2:41:48 PM	H2 MFC set to  0.000000
9/11/2012	2:41:48 PM	BCl3 MFC set to  0.000000
9/11/2012	2:41:48 PM	PH3 MFC set to  0.000000
9/11/2012	2:41:48 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:41:48 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:41:48 PM	Tube furnace set to 0
9/11/2012	2:42:18 PM	H2 valve closed
9/11/2012	2:42:18 PM	BCl3 valve closed
9/11/2012	2:42:18 PM	PH3 valve closed
9/11/2012	2:42:18 PM	SiCl4 pre valve closed
9/11/2012	2:42:18 PM	SiCl4 post valve closed
9/11/2012	2:42:18 PM	Bypass valve closed
9/11/2012	2:42:18 PM	Bubbler valve closed
9/11/2012	2:42:18 PM	Helium valve opened
9/11/2012	2:42:18 PM	Main Vac valve opened
9/11/2012	2:42:18 PM	Helium MFC set to  20.000000
9/11/2012	2:42:18 PM	H2 MFC set to  0.000000
9/11/2012	2:42:18 PM	BCl3 MFC set to  0.000000
9/11/2012	2:42:18 PM	PH3 MFC set to  0.000000
9/11/2012	2:42:18 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:42:18 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:42:18 PM	Tube furnace set to 0
9/11/2012	2:42:48 PM	Helium valve closed
9/11/2012	2:42:48 PM	H2 valve closed
9/11/2012	2:42:48 PM	BCl3 valve closed
9/11/2012	2:42:48 PM	PH3 valve closed
9/11/2012	2:42:48 PM	SiCl4 pre valve closed
9/11/2012	2:42:48 PM	SiCl4 post valve closed
9/11/2012	2:42:48 PM	Bypass valve closed
9/11/2012	2:42:48 PM	Bubbler valve closed
9/11/2012	2:42:48 PM	Main Vac valve opened
9/11/2012	2:42:48 PM	Helium MFC set to  0.000000
9/11/2012	2:42:48 PM	H2 MFC set to  0.000000
9/11/2012	2:42:48 PM	BCl3 MFC set to  0.000000
9/11/2012	2:42:48 PM	PH3 MFC set to  0.000000
9/11/2012	2:42:48 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:42:48 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:42:49 PM	Tube furnace set to 0
9/11/2012	2:43:19 PM	H2 valve closed
9/11/2012	2:43:19 PM	BCl3 valve closed
9/11/2012	2:43:19 PM	PH3 valve closed
9/11/2012	2:43:19 PM	SiCl4 pre valve closed
9/11/2012	2:43:19 PM	SiCl4 post valve closed
9/11/2012	2:43:19 PM	Bypass valve closed
9/11/2012	2:43:19 PM	Bubbler valve closed
9/11/2012	2:43:19 PM	Helium valve opened
9/11/2012	2:43:19 PM	Main Vac valve opened
9/11/2012	2:43:19 PM	Helium MFC set to  20.000000
9/11/2012	2:43:19 PM	H2 MFC set to  0.000000
9/11/2012	2:43:19 PM	BCl3 MFC set to  0.000000
9/11/2012	2:43:19 PM	PH3 MFC set to  0.000000
9/11/2012	2:43:19 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:43:19 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:43:19 PM	Tube furnace set to 0
9/11/2012	2:43:49 PM	Helium valve closed
9/11/2012	2:43:49 PM	H2 valve closed
9/11/2012	2:43:49 PM	BCl3 valve closed
9/11/2012	2:43:49 PM	PH3 valve closed
9/11/2012	2:43:49 PM	SiCl4 pre valve closed
9/11/2012	2:43:49 PM	SiCl4 post valve closed
9/11/2012	2:43:49 PM	Bypass valve closed
9/11/2012	2:43:49 PM	Bubbler valve closed
9/11/2012	2:43:49 PM	Main Vac valve opened
9/11/2012	2:43:49 PM	Helium MFC set to  0.000000
9/11/2012	2:43:49 PM	H2 MFC set to  0.000000
9/11/2012	2:43:49 PM	BCl3 MFC set to  0.000000
9/11/2012	2:43:49 PM	PH3 MFC set to  0.000000
9/11/2012	2:43:49 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:43:49 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:43:49 PM	Tube furnace set to 0
9/11/2012	2:44:19 PM	H2 valve closed
9/11/2012	2:44:19 PM	BCl3 valve closed
9/11/2012	2:44:19 PM	PH3 valve closed
9/11/2012	2:44:19 PM	SiCl4 pre valve closed
9/11/2012	2:44:19 PM	SiCl4 post valve closed
9/11/2012	2:44:19 PM	Bypass valve closed
9/11/2012	2:44:19 PM	Bubbler valve closed
9/11/2012	2:44:19 PM	Helium valve opened
9/11/2012	2:44:19 PM	Main Vac valve opened
9/11/2012	2:44:19 PM	Helium MFC set to  20.000000
9/11/2012	2:44:19 PM	H2 MFC set to  0.000000
9/11/2012	2:44:19 PM	BCl3 MFC set to  0.000000
9/11/2012	2:44:19 PM	PH3 MFC set to  0.000000
9/11/2012	2:44:19 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:44:19 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:44:19 PM	Tube furnace set to 0
9/11/2012	2:44:49 PM	Helium valve closed
9/11/2012	2:44:49 PM	H2 valve closed
9/11/2012	2:44:49 PM	BCl3 valve closed
9/11/2012	2:44:49 PM	PH3 valve closed
9/11/2012	2:44:49 PM	SiCl4 pre valve closed
9/11/2012	2:44:49 PM	SiCl4 post valve closed
9/11/2012	2:44:49 PM	Bypass valve closed
9/11/2012	2:44:49 PM	Bubbler valve closed
9/11/2012	2:44:49 PM	Main Vac valve opened
9/11/2012	2:44:49 PM	Helium MFC set to  0.000000
9/11/2012	2:44:49 PM	H2 MFC set to  0.000000
9/11/2012	2:44:49 PM	BCl3 MFC set to  0.000000
9/11/2012	2:44:49 PM	PH3 MFC set to  0.000000
9/11/2012	2:44:49 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:44:49 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:44:50 PM	Tube furnace set to 0
9/11/2012	2:45:20 PM	H2 valve closed
9/11/2012	2:45:20 PM	BCl3 valve closed
9/11/2012	2:45:20 PM	PH3 valve closed
9/11/2012	2:45:20 PM	SiCl4 pre valve closed
9/11/2012	2:45:20 PM	SiCl4 post valve closed
9/11/2012	2:45:20 PM	Bypass valve closed
9/11/2012	2:45:20 PM	Bubbler valve closed
9/11/2012	2:45:20 PM	Helium valve opened
9/11/2012	2:45:20 PM	Main Vac valve opened
9/11/2012	2:45:20 PM	Helium MFC set to  20.000000
9/11/2012	2:45:20 PM	H2 MFC set to  0.000000
9/11/2012	2:45:20 PM	BCl3 MFC set to  0.000000
9/11/2012	2:45:20 PM	PH3 MFC set to  0.000000
9/11/2012	2:45:20 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:45:20 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:45:20 PM	Tube furnace set to 0
9/11/2012	2:45:50 PM	Helium valve closed
9/11/2012	2:45:50 PM	H2 valve closed
9/11/2012	2:45:50 PM	BCl3 valve closed
9/11/2012	2:45:50 PM	PH3 valve closed
9/11/2012	2:45:50 PM	SiCl4 pre valve closed
9/11/2012	2:45:50 PM	SiCl4 post valve closed
9/11/2012	2:45:50 PM	Bypass valve closed
9/11/2012	2:45:50 PM	Bubbler valve closed
9/11/2012	2:45:50 PM	Main Vac valve opened
9/11/2012	2:45:50 PM	Helium MFC set to  0.000000
9/11/2012	2:45:50 PM	H2 MFC set to  0.000000
9/11/2012	2:45:50 PM	BCl3 MFC set to  0.000000
9/11/2012	2:45:50 PM	PH3 MFC set to  0.000000
9/11/2012	2:45:50 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:45:50 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:45:50 PM	Tube furnace set to 0
9/11/2012	2:45:51 PM	Run finished at 2:45 PM
9/11/2012	2:45:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/11/2012	2:47:10 PM	Recipe started at 2:47 PM
9/11/2012	2:47:10 PM	Helium valve closed
9/11/2012	2:47:10 PM	H2 valve closed
9/11/2012	2:47:10 PM	BCl3 valve closed
9/11/2012	2:47:10 PM	PH3 valve closed
9/11/2012	2:47:10 PM	SiCl4 pre valve closed
9/11/2012	2:47:10 PM	SiCl4 post valve closed
9/11/2012	2:47:10 PM	Main Vac valve closed
9/11/2012	2:47:10 PM	Bypass valve closed
9/11/2012	2:47:10 PM	Bubbler valve closed
9/11/2012	2:47:10 PM	Helium MFC set to  0.000000
9/11/2012	2:47:10 PM	H2 MFC set to  0.000000
9/11/2012	2:47:10 PM	BCl3 MFC set to  0.000000
9/11/2012	2:47:10 PM	PH3 MFC set to  0.000000
9/11/2012	2:47:10 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:47:10 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:47:10 PM	Tube furnace set to 0
9/11/2012	2:47:13 PM	Helium valve closed
9/11/2012	2:47:13 PM	BCl3 valve closed
9/11/2012	2:47:13 PM	PH3 valve closed
9/11/2012	2:47:13 PM	SiCl4 pre valve closed
9/11/2012	2:47:13 PM	SiCl4 post valve closed
9/11/2012	2:47:13 PM	Main Vac valve closed
9/11/2012	2:47:13 PM	Bypass valve closed
9/11/2012	2:47:13 PM	Bubbler valve closed
9/11/2012	2:47:13 PM	H2 valve opened
9/11/2012	2:47:13 PM	Helium MFC set to  0.000000
9/11/2012	2:47:13 PM	H2 MFC set to  500.000000
9/11/2012	2:47:13 PM	BCl3 MFC set to  0.000000
9/11/2012	2:47:13 PM	PH3 MFC set to  0.000000
9/11/2012	2:47:13 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:47:13 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:47:13 PM	Tube furnace set to 0
9/11/2012	2:48:28 PM	Helium valve closed
9/11/2012	2:48:28 PM	BCl3 valve closed
9/11/2012	2:48:28 PM	PH3 valve closed
9/11/2012	2:48:28 PM	SiCl4 pre valve closed
9/11/2012	2:48:28 PM	SiCl4 post valve closed
9/11/2012	2:48:28 PM	Main Vac valve closed
9/11/2012	2:48:28 PM	Bypass valve closed
9/11/2012	2:48:28 PM	H2 valve opened
9/11/2012	2:48:28 PM	Bubbler valve opened
9/11/2012	2:48:28 PM	Helium MFC set to  0.000000
9/11/2012	2:48:28 PM	H2 MFC set to  500.000000
9/11/2012	2:48:28 PM	BCl3 MFC set to  0.000000
9/11/2012	2:48:28 PM	PH3 MFC set to  0.000000
9/11/2012	2:48:28 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:48:28 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:48:29 PM	Tube furnace set to 0
9/11/2012	2:48:30 PM	Helium valve closed
9/11/2012	2:48:30 PM	BCl3 valve closed
9/11/2012	2:48:30 PM	PH3 valve closed
9/11/2012	2:48:30 PM	SiCl4 pre valve closed
9/11/2012	2:48:30 PM	SiCl4 post valve closed
9/11/2012	2:48:30 PM	Main Vac valve closed
9/11/2012	2:48:30 PM	Bypass valve closed
9/11/2012	2:48:30 PM	H2 valve opened
9/11/2012	2:48:30 PM	Bubbler valve opened
9/11/2012	2:48:30 PM	Helium MFC set to  0.000000
9/11/2012	2:48:30 PM	H2 MFC set to  500.000000
9/11/2012	2:48:30 PM	BCl3 MFC set to  0.000000
9/11/2012	2:48:30 PM	PH3 MFC set to  0.000000
9/11/2012	2:48:30 PM	SiCl4 MFC set to  0.000000
9/11/2012	2:48:30 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	2:48:30 PM	Tube furnace set to 1000
9/11/2012	3:08:30 PM	Helium valve closed
9/11/2012	3:08:30 PM	PH3 valve closed
9/11/2012	3:08:30 PM	Main Vac valve closed
9/11/2012	3:08:30 PM	Bypass valve closed
9/11/2012	3:08:30 PM	H2 valve opened
9/11/2012	3:08:30 PM	BCl3 valve opened
9/11/2012	3:08:30 PM	SiCl4 pre valve opened
9/11/2012	3:08:30 PM	SiCl4 post valve opened
9/11/2012	3:08:30 PM	Bubbler valve opened
9/11/2012	3:08:30 PM	Helium MFC set to  0.000000
9/11/2012	3:08:30 PM	H2 MFC set to  450.000000
9/11/2012	3:08:30 PM	BCl3 MFC set to  1.300000
9/11/2012	3:08:30 PM	PH3 MFC set to  0.000000
9/11/2012	3:08:30 PM	SiCl4 MFC set to  50.000000
9/11/2012	3:08:30 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	3:08:30 PM	Tube furnace set to 1000
9/11/2012	3:25:30 PM	Helium valve closed
9/11/2012	3:25:30 PM	BCl3 valve closed
9/11/2012	3:25:30 PM	PH3 valve closed
9/11/2012	3:25:30 PM	SiCl4 pre valve closed
9/11/2012	3:25:30 PM	SiCl4 post valve closed
9/11/2012	3:25:30 PM	Main Vac valve closed
9/11/2012	3:25:30 PM	Bypass valve closed
9/11/2012	3:25:30 PM	H2 valve opened
9/11/2012	3:25:30 PM	Bubbler valve opened
9/11/2012	3:25:30 PM	Helium MFC set to  0.000000
9/11/2012	3:25:30 PM	H2 MFC set to  500.000000
9/11/2012	3:25:30 PM	BCl3 MFC set to  0.000000
9/11/2012	3:25:30 PM	PH3 MFC set to  0.000000
9/11/2012	3:25:30 PM	SiCl4 MFC set to  0.000000
9/11/2012	3:25:30 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	3:25:30 PM	Tube furnace set to 750
9/11/2012	3:30:30 PM	H2 valve closed
9/11/2012	3:30:30 PM	BCl3 valve closed
9/11/2012	3:30:30 PM	PH3 valve closed
9/11/2012	3:30:30 PM	SiCl4 pre valve closed
9/11/2012	3:30:30 PM	SiCl4 post valve closed
9/11/2012	3:30:30 PM	Main Vac valve closed
9/11/2012	3:30:30 PM	Bypass valve closed
9/11/2012	3:30:30 PM	Helium valve opened
9/11/2012	3:30:30 PM	Bubbler valve opened
9/11/2012	3:30:30 PM	Helium MFC set to  500.000000
9/11/2012	3:30:30 PM	H2 MFC set to  0.000000
9/11/2012	3:30:30 PM	BCl3 MFC set to  0.000000
9/11/2012	3:30:30 PM	PH3 MFC set to  0.000000
9/11/2012	3:30:30 PM	SiCl4 MFC set to  0.000000
9/11/2012	3:30:30 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	3:30:31 PM	Tube furnace set to 0
9/11/2012	3:50:31 PM	Helium valve closed
9/11/2012	3:50:31 PM	H2 valve closed
9/11/2012	3:50:31 PM	BCl3 valve closed
9/11/2012	3:50:31 PM	PH3 valve closed
9/11/2012	3:50:31 PM	SiCl4 pre valve closed
9/11/2012	3:50:31 PM	SiCl4 post valve closed
9/11/2012	3:50:31 PM	Main Vac valve closed
9/11/2012	3:50:31 PM	Bypass valve closed
9/11/2012	3:50:31 PM	Bubbler valve closed
9/11/2012	3:50:31 PM	Helium MFC set to  0.000000
9/11/2012	3:50:31 PM	H2 MFC set to  0.000000
9/11/2012	3:50:31 PM	BCl3 MFC set to  0.000000
9/11/2012	3:50:31 PM	PH3 MFC set to  0.000000
9/11/2012	3:50:31 PM	SiCl4 MFC set to  0.000000
9/11/2012	3:50:31 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	3:50:31 PM	Tube furnace set to 0
9/11/2012	3:50:32 PM	Run finished at 3:50 PM
9/11/2012	4:55:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2012	4:55:31 PM	Recipe started at 4:55 PM
9/11/2012	4:55:31 PM	Helium valve closed
9/11/2012	4:55:31 PM	H2 valve closed
9/11/2012	4:55:31 PM	BCl3 valve closed
9/11/2012	4:55:31 PM	PH3 valve closed
9/11/2012	4:55:31 PM	SiCl4 pre valve closed
9/11/2012	4:55:31 PM	SiCl4 post valve closed
9/11/2012	4:55:31 PM	Main Vac valve closed
9/11/2012	4:55:31 PM	Bypass valve closed
9/11/2012	4:55:31 PM	Bubbler valve closed
9/11/2012	4:55:31 PM	Helium MFC set to  0.000000
9/11/2012	4:55:31 PM	H2 MFC set to  0.000000
9/11/2012	4:55:31 PM	BCl3 MFC set to  0.000000
9/11/2012	4:55:31 PM	PH3 MFC set to  0.000000
9/11/2012	4:55:31 PM	SiCl4 MFC set to  0.000000
9/11/2012	4:55:31 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	4:55:31 PM	Tube furnace set to 0
9/11/2012	4:55:34 PM	H2 valve closed
9/11/2012	4:55:34 PM	BCl3 valve closed
9/11/2012	4:55:34 PM	PH3 valve closed
9/11/2012	4:55:34 PM	SiCl4 pre valve closed
9/11/2012	4:55:34 PM	SiCl4 post valve closed
9/11/2012	4:55:34 PM	Main Vac valve closed
9/11/2012	4:55:34 PM	Bypass valve closed
9/11/2012	4:55:34 PM	Bubbler valve closed
9/11/2012	4:55:34 PM	Helium valve opened
9/11/2012	4:55:34 PM	Helium MFC set to  500.000000
9/11/2012	4:55:34 PM	H2 MFC set to  0.000000
9/11/2012	4:55:34 PM	BCl3 MFC set to  0.000000
9/11/2012	4:55:34 PM	PH3 MFC set to  0.000000
9/11/2012	4:55:34 PM	SiCl4 MFC set to  0.000000
9/11/2012	4:55:34 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	4:55:34 PM	Tube furnace set to 0
9/11/2012	4:55:37 PM	Helium valve closed
9/11/2012	4:55:37 PM	H2 valve closed
9/11/2012	4:55:37 PM	BCl3 valve closed
9/11/2012	4:55:37 PM	PH3 valve closed
9/11/2012	4:55:37 PM	SiCl4 pre valve closed
9/11/2012	4:55:37 PM	SiCl4 post valve closed
9/11/2012	4:55:37 PM	Main Vac valve closed
9/11/2012	4:55:37 PM	Bypass valve closed
9/11/2012	4:55:37 PM	Bubbler valve closed
9/11/2012	4:55:37 PM	Helium MFC set to  0.000000
9/11/2012	4:55:37 PM	H2 MFC set to  0.000000
9/11/2012	4:55:37 PM	BCl3 MFC set to  0.000000
9/11/2012	4:55:37 PM	PH3 MFC set to  0.000000
9/11/2012	4:55:37 PM	SiCl4 MFC set to  0.000000
9/11/2012	4:55:37 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	4:55:37 PM	Tube furnace set to 0
9/11/2012	4:55:38 PM	Run finished at 4:55 PM
9/11/2012	4:55:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2012	4:59:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/11/2012	4:59:17 PM	Recipe started at 4:59 PM
9/11/2012	4:59:17 PM	Helium valve closed
9/11/2012	4:59:17 PM	H2 valve closed
9/11/2012	4:59:17 PM	BCl3 valve closed
9/11/2012	4:59:17 PM	PH3 valve closed
9/11/2012	4:59:17 PM	SiCl4 pre valve closed
9/11/2012	4:59:17 PM	SiCl4 post valve closed
9/11/2012	4:59:17 PM	Main Vac valve closed
9/11/2012	4:59:17 PM	Bubbler valve closed
9/11/2012	4:59:17 PM	Bypass valve opened
9/11/2012	4:59:17 PM	Helium MFC set to  0.000000
9/11/2012	4:59:17 PM	H2 MFC set to  0.000000
9/11/2012	4:59:17 PM	BCl3 MFC set to  0.000000
9/11/2012	4:59:17 PM	PH3 MFC set to  0.000000
9/11/2012	4:59:17 PM	SiCl4 MFC set to  0.000000
9/11/2012	4:59:17 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	4:59:17 PM	Tube furnace set to 0
9/11/2012	5:00:32 PM	Helium valve closed
9/11/2012	5:00:32 PM	H2 valve closed
9/11/2012	5:00:32 PM	BCl3 valve closed
9/11/2012	5:00:32 PM	PH3 valve closed
9/11/2012	5:00:32 PM	SiCl4 pre valve closed
9/11/2012	5:00:32 PM	SiCl4 post valve closed
9/11/2012	5:00:32 PM	Main Vac valve closed
9/11/2012	5:00:32 PM	Bubbler valve closed
9/11/2012	5:00:32 PM	Bypass valve opened
9/11/2012	5:00:32 PM	Helium MFC set to  0.000000
9/11/2012	5:00:32 PM	H2 MFC set to  0.000000
9/11/2012	5:00:32 PM	BCl3 MFC set to  0.000000
9/11/2012	5:00:32 PM	PH3 MFC set to  0.000000
9/11/2012	5:00:32 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:00:32 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:00:32 PM	Tube furnace set to 0
9/11/2012	5:01:32 PM	Helium valve closed
9/11/2012	5:01:32 PM	H2 valve closed
9/11/2012	5:01:32 PM	BCl3 valve closed
9/11/2012	5:01:32 PM	PH3 valve closed
9/11/2012	5:01:32 PM	SiCl4 pre valve closed
9/11/2012	5:01:32 PM	SiCl4 post valve closed
9/11/2012	5:01:32 PM	Bypass valve closed
9/11/2012	5:01:32 PM	Bubbler valve closed
9/11/2012	5:01:32 PM	Main Vac valve opened
9/11/2012	5:01:32 PM	Helium MFC set to  0.000000
9/11/2012	5:01:32 PM	H2 MFC set to  0.000000
9/11/2012	5:01:32 PM	BCl3 MFC set to  0.000000
9/11/2012	5:01:32 PM	PH3 MFC set to  0.000000
9/11/2012	5:01:32 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:01:32 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:01:32 PM	Tube furnace set to 0
9/11/2012	5:01:33 PM	Run finished at 5:01 PM
9/11/2012	5:01:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/11/2012	5:21:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/11/2012	5:21:52 PM	Recipe started at 5:21 PM
9/11/2012	5:21:52 PM	Helium valve closed
9/11/2012	5:21:53 PM	H2 valve closed
9/11/2012	5:21:53 PM	BCl3 valve closed
9/11/2012	5:21:53 PM	PH3 valve closed
9/11/2012	5:21:53 PM	SiCl4 pre valve closed
9/11/2012	5:21:53 PM	SiCl4 post valve closed
9/11/2012	5:21:53 PM	Main Vac valve closed
9/11/2012	5:21:53 PM	Bubbler valve closed
9/11/2012	5:21:53 PM	Bypass valve opened
9/11/2012	5:21:53 PM	Helium MFC set to  0.000000
9/11/2012	5:21:53 PM	H2 MFC set to  0.000000
9/11/2012	5:21:53 PM	BCl3 MFC set to  0.000000
9/11/2012	5:21:53 PM	PH3 MFC set to  0.000000
9/11/2012	5:21:53 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:21:53 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:21:53 PM	Tube furnace set to 0
9/11/2012	5:21:53 PM	Helium valve closed
9/11/2012	5:21:53 PM	H2 valve closed
9/11/2012	5:21:53 PM	BCl3 valve closed
9/11/2012	5:21:53 PM	PH3 valve closed
9/11/2012	5:21:53 PM	SiCl4 pre valve closed
9/11/2012	5:21:53 PM	SiCl4 post valve closed
9/11/2012	5:21:53 PM	Main Vac valve closed
9/11/2012	5:21:53 PM	Bubbler valve closed
9/11/2012	5:21:53 PM	Bypass valve opened
9/11/2012	5:21:53 PM	Helium MFC set to  0.000000
9/11/2012	5:21:53 PM	H2 MFC set to  0.000000
9/11/2012	5:21:53 PM	BCl3 MFC set to  0.000000
9/11/2012	5:21:53 PM	PH3 MFC set to  0.000000
9/11/2012	5:21:53 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:21:53 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:21:53 PM	Tube furnace set to 0
9/11/2012	5:21:55 PM	Helium valve closed
9/11/2012	5:21:55 PM	H2 valve closed
9/11/2012	5:21:55 PM	BCl3 valve closed
9/11/2012	5:21:55 PM	PH3 valve closed
9/11/2012	5:21:55 PM	SiCl4 pre valve closed
9/11/2012	5:21:55 PM	SiCl4 post valve closed
9/11/2012	5:21:55 PM	Bypass valve closed
9/11/2012	5:21:55 PM	Bubbler valve closed
9/11/2012	5:21:55 PM	Main Vac valve opened
9/11/2012	5:21:55 PM	Helium MFC set to  0.000000
9/11/2012	5:21:55 PM	H2 MFC set to  0.000000
9/11/2012	5:21:55 PM	BCl3 MFC set to  0.000000
9/11/2012	5:21:55 PM	PH3 MFC set to  0.000000
9/11/2012	5:21:55 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:21:55 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:21:55 PM	Tube furnace set to 0
9/11/2012	5:21:57 PM	H2 valve closed
9/11/2012	5:21:57 PM	BCl3 valve closed
9/11/2012	5:21:57 PM	PH3 valve closed
9/11/2012	5:21:57 PM	SiCl4 pre valve closed
9/11/2012	5:21:57 PM	SiCl4 post valve closed
9/11/2012	5:21:57 PM	Bypass valve closed
9/11/2012	5:21:57 PM	Bubbler valve closed
9/11/2012	5:21:57 PM	Helium valve opened
9/11/2012	5:21:57 PM	Main Vac valve opened
9/11/2012	5:21:57 PM	Helium MFC set to  20.000000
9/11/2012	5:21:57 PM	H2 MFC set to  0.000000
9/11/2012	5:21:57 PM	BCl3 MFC set to  0.000000
9/11/2012	5:21:57 PM	PH3 MFC set to  0.000000
9/11/2012	5:21:57 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:21:57 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:21:57 PM	Tube furnace set to 0
9/11/2012	5:22:27 PM	Helium valve closed
9/11/2012	5:22:27 PM	H2 valve closed
9/11/2012	5:22:27 PM	BCl3 valve closed
9/11/2012	5:22:27 PM	PH3 valve closed
9/11/2012	5:22:27 PM	SiCl4 pre valve closed
9/11/2012	5:22:27 PM	SiCl4 post valve closed
9/11/2012	5:22:27 PM	Bypass valve closed
9/11/2012	5:22:27 PM	Bubbler valve closed
9/11/2012	5:22:27 PM	Main Vac valve opened
9/11/2012	5:22:27 PM	Helium MFC set to  0.000000
9/11/2012	5:22:27 PM	H2 MFC set to  0.000000
9/11/2012	5:22:27 PM	BCl3 MFC set to  0.000000
9/11/2012	5:22:27 PM	PH3 MFC set to  0.000000
9/11/2012	5:22:27 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:22:27 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:22:27 PM	Tube furnace set to 0
9/11/2012	5:22:57 PM	H2 valve closed
9/11/2012	5:22:57 PM	BCl3 valve closed
9/11/2012	5:22:57 PM	PH3 valve closed
9/11/2012	5:22:57 PM	SiCl4 pre valve closed
9/11/2012	5:22:57 PM	SiCl4 post valve closed
9/11/2012	5:22:57 PM	Bypass valve closed
9/11/2012	5:22:57 PM	Bubbler valve closed
9/11/2012	5:22:57 PM	Helium valve opened
9/11/2012	5:22:57 PM	Main Vac valve opened
9/11/2012	5:22:57 PM	Helium MFC set to  20.000000
9/11/2012	5:22:57 PM	H2 MFC set to  0.000000
9/11/2012	5:22:58 PM	BCl3 MFC set to  0.000000
9/11/2012	5:22:58 PM	PH3 MFC set to  0.000000
9/11/2012	5:22:58 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:22:58 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:22:58 PM	Tube furnace set to 0
9/11/2012	5:23:28 PM	Helium valve closed
9/11/2012	5:23:28 PM	H2 valve closed
9/11/2012	5:23:28 PM	BCl3 valve closed
9/11/2012	5:23:28 PM	PH3 valve closed
9/11/2012	5:23:28 PM	SiCl4 pre valve closed
9/11/2012	5:23:28 PM	SiCl4 post valve closed
9/11/2012	5:23:28 PM	Bypass valve closed
9/11/2012	5:23:28 PM	Bubbler valve closed
9/11/2012	5:23:28 PM	Main Vac valve opened
9/11/2012	5:23:28 PM	Helium MFC set to  0.000000
9/11/2012	5:23:28 PM	H2 MFC set to  0.000000
9/11/2012	5:23:28 PM	BCl3 MFC set to  0.000000
9/11/2012	5:23:28 PM	PH3 MFC set to  0.000000
9/11/2012	5:23:28 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:23:28 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:23:28 PM	Tube furnace set to 0
9/11/2012	5:23:58 PM	H2 valve closed
9/11/2012	5:23:58 PM	BCl3 valve closed
9/11/2012	5:23:58 PM	PH3 valve closed
9/11/2012	5:23:58 PM	SiCl4 pre valve closed
9/11/2012	5:23:58 PM	SiCl4 post valve closed
9/11/2012	5:23:58 PM	Bypass valve closed
9/11/2012	5:23:58 PM	Bubbler valve closed
9/11/2012	5:23:58 PM	Helium valve opened
9/11/2012	5:23:58 PM	Main Vac valve opened
9/11/2012	5:23:58 PM	Helium MFC set to  20.000000
9/11/2012	5:23:58 PM	H2 MFC set to  0.000000
9/11/2012	5:23:58 PM	BCl3 MFC set to  0.000000
9/11/2012	5:23:58 PM	PH3 MFC set to  0.000000
9/11/2012	5:23:58 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:23:58 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:23:58 PM	Tube furnace set to 0
9/11/2012	5:24:28 PM	Helium valve closed
9/11/2012	5:24:28 PM	H2 valve closed
9/11/2012	5:24:28 PM	BCl3 valve closed
9/11/2012	5:24:28 PM	PH3 valve closed
9/11/2012	5:24:28 PM	SiCl4 pre valve closed
9/11/2012	5:24:28 PM	SiCl4 post valve closed
9/11/2012	5:24:28 PM	Bypass valve closed
9/11/2012	5:24:28 PM	Bubbler valve closed
9/11/2012	5:24:28 PM	Main Vac valve opened
9/11/2012	5:24:28 PM	Helium MFC set to  0.000000
9/11/2012	5:24:28 PM	H2 MFC set to  0.000000
9/11/2012	5:24:28 PM	BCl3 MFC set to  0.000000
9/11/2012	5:24:28 PM	PH3 MFC set to  0.000000
9/11/2012	5:24:28 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:24:28 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:24:28 PM	Tube furnace set to 0
9/11/2012	5:24:58 PM	H2 valve closed
9/11/2012	5:24:58 PM	BCl3 valve closed
9/11/2012	5:24:58 PM	PH3 valve closed
9/11/2012	5:24:58 PM	SiCl4 pre valve closed
9/11/2012	5:24:58 PM	SiCl4 post valve closed
9/11/2012	5:24:58 PM	Bypass valve closed
9/11/2012	5:24:58 PM	Bubbler valve closed
9/11/2012	5:24:58 PM	Helium valve opened
9/11/2012	5:24:58 PM	Main Vac valve opened
9/11/2012	5:24:58 PM	Helium MFC set to  20.000000
9/11/2012	5:24:58 PM	H2 MFC set to  0.000000
9/11/2012	5:24:58 PM	BCl3 MFC set to  0.000000
9/11/2012	5:24:58 PM	PH3 MFC set to  0.000000
9/11/2012	5:24:58 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:24:58 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:24:59 PM	Tube furnace set to 0
9/11/2012	5:25:29 PM	Helium valve closed
9/11/2012	5:25:29 PM	H2 valve closed
9/11/2012	5:25:29 PM	BCl3 valve closed
9/11/2012	5:25:29 PM	PH3 valve closed
9/11/2012	5:25:29 PM	SiCl4 pre valve closed
9/11/2012	5:25:29 PM	SiCl4 post valve closed
9/11/2012	5:25:29 PM	Bypass valve closed
9/11/2012	5:25:29 PM	Bubbler valve closed
9/11/2012	5:25:29 PM	Main Vac valve opened
9/11/2012	5:25:29 PM	Helium MFC set to  0.000000
9/11/2012	5:25:29 PM	H2 MFC set to  0.000000
9/11/2012	5:25:29 PM	BCl3 MFC set to  0.000000
9/11/2012	5:25:29 PM	PH3 MFC set to  0.000000
9/11/2012	5:25:29 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:25:29 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:25:29 PM	Tube furnace set to 0
9/11/2012	5:25:59 PM	H2 valve closed
9/11/2012	5:25:59 PM	BCl3 valve closed
9/11/2012	5:25:59 PM	PH3 valve closed
9/11/2012	5:25:59 PM	SiCl4 pre valve closed
9/11/2012	5:25:59 PM	SiCl4 post valve closed
9/11/2012	5:25:59 PM	Bypass valve closed
9/11/2012	5:25:59 PM	Bubbler valve closed
9/11/2012	5:25:59 PM	Helium valve opened
9/11/2012	5:25:59 PM	Main Vac valve opened
9/11/2012	5:25:59 PM	Helium MFC set to  20.000000
9/11/2012	5:25:59 PM	H2 MFC set to  0.000000
9/11/2012	5:25:59 PM	BCl3 MFC set to  0.000000
9/11/2012	5:25:59 PM	PH3 MFC set to  0.000000
9/11/2012	5:25:59 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:25:59 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:25:59 PM	Tube furnace set to 0
9/11/2012	5:26:29 PM	Helium valve closed
9/11/2012	5:26:29 PM	H2 valve closed
9/11/2012	5:26:29 PM	BCl3 valve closed
9/11/2012	5:26:29 PM	PH3 valve closed
9/11/2012	5:26:29 PM	SiCl4 pre valve closed
9/11/2012	5:26:29 PM	SiCl4 post valve closed
9/11/2012	5:26:29 PM	Bypass valve closed
9/11/2012	5:26:29 PM	Bubbler valve closed
9/11/2012	5:26:29 PM	Main Vac valve opened
9/11/2012	5:26:29 PM	Helium MFC set to  0.000000
9/11/2012	5:26:29 PM	H2 MFC set to  0.000000
9/11/2012	5:26:29 PM	BCl3 MFC set to  0.000000
9/11/2012	5:26:29 PM	PH3 MFC set to  0.000000
9/11/2012	5:26:29 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:26:29 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:26:29 PM	Tube furnace set to 0
9/11/2012	5:26:59 PM	H2 valve closed
9/11/2012	5:26:59 PM	BCl3 valve closed
9/11/2012	5:26:59 PM	PH3 valve closed
9/11/2012	5:26:59 PM	SiCl4 pre valve closed
9/11/2012	5:26:59 PM	SiCl4 post valve closed
9/11/2012	5:26:59 PM	Bypass valve closed
9/11/2012	5:26:59 PM	Bubbler valve closed
9/11/2012	5:26:59 PM	Helium valve opened
9/11/2012	5:26:59 PM	Main Vac valve opened
9/11/2012	5:26:59 PM	Helium MFC set to  20.000000
9/11/2012	5:26:59 PM	H2 MFC set to  0.000000
9/11/2012	5:26:59 PM	BCl3 MFC set to  0.000000
9/11/2012	5:26:59 PM	PH3 MFC set to  0.000000
9/11/2012	5:26:59 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:26:59 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:27:00 PM	Tube furnace set to 0
9/11/2012	5:27:30 PM	Helium valve closed
9/11/2012	5:27:30 PM	H2 valve closed
9/11/2012	5:27:30 PM	BCl3 valve closed
9/11/2012	5:27:30 PM	PH3 valve closed
9/11/2012	5:27:30 PM	SiCl4 pre valve closed
9/11/2012	5:27:30 PM	SiCl4 post valve closed
9/11/2012	5:27:30 PM	Bypass valve closed
9/11/2012	5:27:30 PM	Bubbler valve closed
9/11/2012	5:27:30 PM	Main Vac valve opened
9/11/2012	5:27:30 PM	Helium MFC set to  0.000000
9/11/2012	5:27:30 PM	H2 MFC set to  0.000000
9/11/2012	5:27:30 PM	BCl3 MFC set to  0.000000
9/11/2012	5:27:30 PM	PH3 MFC set to  0.000000
9/11/2012	5:27:30 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:27:30 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:27:30 PM	Tube furnace set to 0
9/11/2012	5:28:00 PM	H2 valve closed
9/11/2012	5:28:00 PM	BCl3 valve closed
9/11/2012	5:28:00 PM	PH3 valve closed
9/11/2012	5:28:00 PM	SiCl4 pre valve closed
9/11/2012	5:28:00 PM	SiCl4 post valve closed
9/11/2012	5:28:00 PM	Bypass valve closed
9/11/2012	5:28:00 PM	Bubbler valve closed
9/11/2012	5:28:00 PM	Helium valve opened
9/11/2012	5:28:00 PM	Main Vac valve opened
9/11/2012	5:28:00 PM	Helium MFC set to  20.000000
9/11/2012	5:28:00 PM	H2 MFC set to  0.000000
9/11/2012	5:28:00 PM	BCl3 MFC set to  0.000000
9/11/2012	5:28:00 PM	PH3 MFC set to  0.000000
9/11/2012	5:28:00 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:28:00 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:28:00 PM	Tube furnace set to 0
9/11/2012	5:28:30 PM	Helium valve closed
9/11/2012	5:28:30 PM	H2 valve closed
9/11/2012	5:28:30 PM	BCl3 valve closed
9/11/2012	5:28:30 PM	PH3 valve closed
9/11/2012	5:28:30 PM	SiCl4 pre valve closed
9/11/2012	5:28:30 PM	SiCl4 post valve closed
9/11/2012	5:28:30 PM	Bypass valve closed
9/11/2012	5:28:30 PM	Bubbler valve closed
9/11/2012	5:28:30 PM	Main Vac valve opened
9/11/2012	5:28:30 PM	Helium MFC set to  0.000000
9/11/2012	5:28:30 PM	H2 MFC set to  0.000000
9/11/2012	5:28:30 PM	BCl3 MFC set to  0.000000
9/11/2012	5:28:30 PM	PH3 MFC set to  0.000000
9/11/2012	5:28:30 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:28:30 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:28:30 PM	Tube furnace set to 0
9/11/2012	5:29:00 PM	H2 valve closed
9/11/2012	5:29:00 PM	BCl3 valve closed
9/11/2012	5:29:00 PM	PH3 valve closed
9/11/2012	5:29:00 PM	SiCl4 pre valve closed
9/11/2012	5:29:00 PM	SiCl4 post valve closed
9/11/2012	5:29:00 PM	Bypass valve closed
9/11/2012	5:29:00 PM	Bubbler valve closed
9/11/2012	5:29:00 PM	Helium valve opened
9/11/2012	5:29:00 PM	Main Vac valve opened
9/11/2012	5:29:00 PM	Helium MFC set to  20.000000
9/11/2012	5:29:00 PM	H2 MFC set to  0.000000
9/11/2012	5:29:00 PM	BCl3 MFC set to  0.000000
9/11/2012	5:29:00 PM	PH3 MFC set to  0.000000
9/11/2012	5:29:00 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:29:00 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:29:01 PM	Tube furnace set to 0
9/11/2012	5:29:31 PM	Helium valve closed
9/11/2012	5:29:31 PM	H2 valve closed
9/11/2012	5:29:31 PM	BCl3 valve closed
9/11/2012	5:29:31 PM	PH3 valve closed
9/11/2012	5:29:31 PM	SiCl4 pre valve closed
9/11/2012	5:29:31 PM	SiCl4 post valve closed
9/11/2012	5:29:31 PM	Bypass valve closed
9/11/2012	5:29:31 PM	Bubbler valve closed
9/11/2012	5:29:31 PM	Main Vac valve opened
9/11/2012	5:29:31 PM	Helium MFC set to  0.000000
9/11/2012	5:29:31 PM	H2 MFC set to  0.000000
9/11/2012	5:29:31 PM	BCl3 MFC set to  0.000000
9/11/2012	5:29:31 PM	PH3 MFC set to  0.000000
9/11/2012	5:29:31 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:29:31 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:29:31 PM	Tube furnace set to 0
9/11/2012	5:30:01 PM	H2 valve closed
9/11/2012	5:30:01 PM	BCl3 valve closed
9/11/2012	5:30:01 PM	PH3 valve closed
9/11/2012	5:30:01 PM	SiCl4 pre valve closed
9/11/2012	5:30:01 PM	SiCl4 post valve closed
9/11/2012	5:30:01 PM	Bypass valve closed
9/11/2012	5:30:01 PM	Bubbler valve closed
9/11/2012	5:30:01 PM	Helium valve opened
9/11/2012	5:30:01 PM	Main Vac valve opened
9/11/2012	5:30:01 PM	Helium MFC set to  20.000000
9/11/2012	5:30:01 PM	H2 MFC set to  0.000000
9/11/2012	5:30:01 PM	BCl3 MFC set to  0.000000
9/11/2012	5:30:01 PM	PH3 MFC set to  0.000000
9/11/2012	5:30:01 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:30:01 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:30:01 PM	Tube furnace set to 0
9/11/2012	5:30:31 PM	Helium valve closed
9/11/2012	5:30:31 PM	H2 valve closed
9/11/2012	5:30:31 PM	BCl3 valve closed
9/11/2012	5:30:31 PM	PH3 valve closed
9/11/2012	5:30:31 PM	SiCl4 pre valve closed
9/11/2012	5:30:31 PM	SiCl4 post valve closed
9/11/2012	5:30:31 PM	Bypass valve closed
9/11/2012	5:30:31 PM	Bubbler valve closed
9/11/2012	5:30:31 PM	Main Vac valve opened
9/11/2012	5:30:31 PM	Helium MFC set to  0.000000
9/11/2012	5:30:31 PM	H2 MFC set to  0.000000
9/11/2012	5:30:31 PM	BCl3 MFC set to  0.000000
9/11/2012	5:30:31 PM	PH3 MFC set to  0.000000
9/11/2012	5:30:31 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:30:31 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:30:31 PM	Tube furnace set to 0
9/11/2012	5:31:01 PM	H2 valve closed
9/11/2012	5:31:01 PM	BCl3 valve closed
9/11/2012	5:31:01 PM	PH3 valve closed
9/11/2012	5:31:01 PM	SiCl4 pre valve closed
9/11/2012	5:31:01 PM	SiCl4 post valve closed
9/11/2012	5:31:01 PM	Bypass valve closed
9/11/2012	5:31:01 PM	Bubbler valve closed
9/11/2012	5:31:01 PM	Helium valve opened
9/11/2012	5:31:01 PM	Main Vac valve opened
9/11/2012	5:31:01 PM	Helium MFC set to  20.000000
9/11/2012	5:31:01 PM	H2 MFC set to  0.000000
9/11/2012	5:31:01 PM	BCl3 MFC set to  0.000000
9/11/2012	5:31:01 PM	PH3 MFC set to  0.000000
9/11/2012	5:31:01 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:31:01 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:31:02 PM	Tube furnace set to 0
9/11/2012	5:31:32 PM	Helium valve closed
9/11/2012	5:31:32 PM	H2 valve closed
9/11/2012	5:31:32 PM	BCl3 valve closed
9/11/2012	5:31:32 PM	PH3 valve closed
9/11/2012	5:31:32 PM	SiCl4 pre valve closed
9/11/2012	5:31:32 PM	SiCl4 post valve closed
9/11/2012	5:31:32 PM	Bypass valve closed
9/11/2012	5:31:32 PM	Bubbler valve closed
9/11/2012	5:31:32 PM	Main Vac valve opened
9/11/2012	5:31:32 PM	Helium MFC set to  0.000000
9/11/2012	5:31:32 PM	H2 MFC set to  0.000000
9/11/2012	5:31:32 PM	BCl3 MFC set to  0.000000
9/11/2012	5:31:32 PM	PH3 MFC set to  0.000000
9/11/2012	5:31:32 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:31:32 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:31:32 PM	Tube furnace set to 0
9/11/2012	5:31:33 PM	Run finished at 5:31 PM
9/11/2012	5:31:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/11/2012	5:33:12 PM	Recipe started at 5:33 PM
9/11/2012	5:33:12 PM	Helium valve closed
9/11/2012	5:33:12 PM	H2 valve closed
9/11/2012	5:33:12 PM	BCl3 valve closed
9/11/2012	5:33:12 PM	PH3 valve closed
9/11/2012	5:33:12 PM	SiCl4 pre valve closed
9/11/2012	5:33:12 PM	SiCl4 post valve closed
9/11/2012	5:33:12 PM	Main Vac valve closed
9/11/2012	5:33:12 PM	Bypass valve closed
9/11/2012	5:33:12 PM	Bubbler valve closed
9/11/2012	5:33:12 PM	Helium MFC set to  0.000000
9/11/2012	5:33:12 PM	H2 MFC set to  0.000000
9/11/2012	5:33:12 PM	BCl3 MFC set to  0.000000
9/11/2012	5:33:12 PM	PH3 MFC set to  0.000000
9/11/2012	5:33:12 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:33:12 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:33:13 PM	Tube furnace set to 0
9/11/2012	5:33:16 PM	Helium valve closed
9/11/2012	5:33:16 PM	BCl3 valve closed
9/11/2012	5:33:16 PM	PH3 valve closed
9/11/2012	5:33:16 PM	SiCl4 pre valve closed
9/11/2012	5:33:16 PM	SiCl4 post valve closed
9/11/2012	5:33:16 PM	Main Vac valve closed
9/11/2012	5:33:16 PM	Bypass valve closed
9/11/2012	5:33:16 PM	Bubbler valve closed
9/11/2012	5:33:16 PM	H2 valve opened
9/11/2012	5:33:16 PM	Helium MFC set to  0.000000
9/11/2012	5:33:16 PM	H2 MFC set to  500.000000
9/11/2012	5:33:16 PM	BCl3 MFC set to  0.000000
9/11/2012	5:33:16 PM	PH3 MFC set to  0.000000
9/11/2012	5:33:16 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:33:16 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:33:16 PM	Tube furnace set to 0
9/11/2012	5:33:48 PM	Run aborted at 5:33 PM
9/11/2012	5:33:48 PM	Helium valve closed
9/11/2012	5:33:48 PM	H2 valve closed
9/11/2012	5:33:48 PM	BCl3 valve closed
9/11/2012	5:33:48 PM	PH3 valve closed
9/11/2012	5:33:48 PM	SiCl4 pre valve closed
9/11/2012	5:33:48 PM	SiCl4 post valve closed
9/11/2012	5:33:48 PM	Bypass valve closed
9/11/2012	5:33:48 PM	Main Vac valve closed
9/11/2012	5:33:48 PM	Bubbler valve closed
9/11/2012	5:33:48 PM	Helium MFC set to  0.000000
9/11/2012	5:33:48 PM	H2 MFC set to  0.000000
9/11/2012	5:33:48 PM	BCl3 MFC set to  0.000000
9/11/2012	5:33:48 PM	PH3 MFC set to  0.000000
9/11/2012	5:33:48 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:33:48 PM	Tube furnace set to 0
9/11/2012	5:34:19 PM	Recipe started at 5:34 PM
9/11/2012	5:34:19 PM	Helium valve closed
9/11/2012	5:34:19 PM	H2 valve closed
9/11/2012	5:34:19 PM	BCl3 valve closed
9/11/2012	5:34:19 PM	PH3 valve closed
9/11/2012	5:34:19 PM	SiCl4 pre valve closed
9/11/2012	5:34:19 PM	SiCl4 post valve closed
9/11/2012	5:34:19 PM	Main Vac valve closed
9/11/2012	5:34:19 PM	Bypass valve closed
9/11/2012	5:34:19 PM	Bubbler valve closed
9/11/2012	5:34:19 PM	Helium MFC set to  0.000000
9/11/2012	5:34:19 PM	H2 MFC set to  0.000000
9/11/2012	5:34:19 PM	BCl3 MFC set to  0.000000
9/11/2012	5:34:19 PM	PH3 MFC set to  0.000000
9/11/2012	5:34:19 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:34:19 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:34:19 PM	Tube furnace set to 0
9/11/2012	5:34:22 PM	Helium valve closed
9/11/2012	5:34:22 PM	BCl3 valve closed
9/11/2012	5:34:22 PM	PH3 valve closed
9/11/2012	5:34:22 PM	SiCl4 pre valve closed
9/11/2012	5:34:22 PM	SiCl4 post valve closed
9/11/2012	5:34:22 PM	Main Vac valve closed
9/11/2012	5:34:22 PM	Bypass valve closed
9/11/2012	5:34:22 PM	Bubbler valve closed
9/11/2012	5:34:22 PM	H2 valve opened
9/11/2012	5:34:22 PM	Helium MFC set to  0.000000
9/11/2012	5:34:22 PM	H2 MFC set to  500.000000
9/11/2012	5:34:22 PM	BCl3 MFC set to  0.000000
9/11/2012	5:34:22 PM	PH3 MFC set to  0.000000
9/11/2012	5:34:22 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:34:22 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:34:22 PM	Tube furnace set to 0
9/11/2012	5:35:05 PM	Helium valve closed
9/11/2012	5:35:05 PM	BCl3 valve closed
9/11/2012	5:35:05 PM	PH3 valve closed
9/11/2012	5:35:05 PM	SiCl4 pre valve closed
9/11/2012	5:35:05 PM	SiCl4 post valve closed
9/11/2012	5:35:05 PM	Main Vac valve closed
9/11/2012	5:35:05 PM	Bypass valve closed
9/11/2012	5:35:05 PM	H2 valve opened
9/11/2012	5:35:05 PM	Bubbler valve opened
9/11/2012	5:35:05 PM	Helium MFC set to  0.000000
9/11/2012	5:35:05 PM	H2 MFC set to  500.000000
9/11/2012	5:35:05 PM	BCl3 MFC set to  0.000000
9/11/2012	5:35:05 PM	PH3 MFC set to  0.000000
9/11/2012	5:35:05 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:35:05 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:35:06 PM	Tube furnace set to 0
9/11/2012	5:35:07 PM	Helium valve closed
9/11/2012	5:35:07 PM	BCl3 valve closed
9/11/2012	5:35:07 PM	PH3 valve closed
9/11/2012	5:35:07 PM	SiCl4 pre valve closed
9/11/2012	5:35:07 PM	SiCl4 post valve closed
9/11/2012	5:35:07 PM	Main Vac valve closed
9/11/2012	5:35:07 PM	Bypass valve closed
9/11/2012	5:35:07 PM	H2 valve opened
9/11/2012	5:35:07 PM	Bubbler valve opened
9/11/2012	5:35:07 PM	Helium MFC set to  0.000000
9/11/2012	5:35:07 PM	H2 MFC set to  500.000000
9/11/2012	5:35:07 PM	BCl3 MFC set to  0.000000
9/11/2012	5:35:07 PM	PH3 MFC set to  0.000000
9/11/2012	5:35:07 PM	SiCl4 MFC set to  0.000000
9/11/2012	5:35:07 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:35:07 PM	Tube furnace set to 1000
9/11/2012	5:55:07 PM	Helium valve closed
9/11/2012	5:55:07 PM	PH3 valve closed
9/11/2012	5:55:07 PM	Main Vac valve closed
9/11/2012	5:55:07 PM	Bypass valve closed
9/11/2012	5:55:07 PM	H2 valve opened
9/11/2012	5:55:07 PM	BCl3 valve opened
9/11/2012	5:55:07 PM	SiCl4 pre valve opened
9/11/2012	5:55:07 PM	SiCl4 post valve opened
9/11/2012	5:55:07 PM	Bubbler valve opened
9/11/2012	5:55:07 PM	Helium MFC set to  0.000000
9/11/2012	5:55:07 PM	H2 MFC set to  450.000000
9/11/2012	5:55:07 PM	BCl3 MFC set to  1.300000
9/11/2012	5:55:07 PM	PH3 MFC set to  0.000000
9/11/2012	5:55:07 PM	SiCl4 MFC set to  50.000000
9/11/2012	5:55:07 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	5:55:07 PM	Tube furnace set to 1000
9/11/2012	6:11:07 PM	Helium valve closed
9/11/2012	6:11:07 PM	BCl3 valve closed
9/11/2012	6:11:07 PM	PH3 valve closed
9/11/2012	6:11:07 PM	SiCl4 pre valve closed
9/11/2012	6:11:07 PM	SiCl4 post valve closed
9/11/2012	6:11:07 PM	Main Vac valve closed
9/11/2012	6:11:07 PM	Bypass valve closed
9/11/2012	6:11:07 PM	H2 valve opened
9/11/2012	6:11:07 PM	Bubbler valve opened
9/11/2012	6:11:07 PM	Helium MFC set to  0.000000
9/11/2012	6:11:07 PM	H2 MFC set to  500.000000
9/11/2012	6:11:07 PM	BCl3 MFC set to  0.000000
9/11/2012	6:11:07 PM	PH3 MFC set to  0.000000
9/11/2012	6:11:07 PM	SiCl4 MFC set to  0.000000
9/11/2012	6:11:07 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	6:11:07 PM	Tube furnace set to 750
9/11/2012	6:16:07 PM	H2 valve closed
9/11/2012	6:16:07 PM	BCl3 valve closed
9/11/2012	6:16:07 PM	PH3 valve closed
9/11/2012	6:16:07 PM	SiCl4 pre valve closed
9/11/2012	6:16:07 PM	SiCl4 post valve closed
9/11/2012	6:16:07 PM	Main Vac valve closed
9/11/2012	6:16:07 PM	Bypass valve closed
9/11/2012	6:16:07 PM	Helium valve opened
9/11/2012	6:16:07 PM	Bubbler valve opened
9/11/2012	6:16:07 PM	Helium MFC set to  500.000000
9/11/2012	6:16:07 PM	H2 MFC set to  0.000000
9/11/2012	6:16:07 PM	BCl3 MFC set to  0.000000
9/11/2012	6:16:07 PM	PH3 MFC set to  0.000000
9/11/2012	6:16:07 PM	SiCl4 MFC set to  0.000000
9/11/2012	6:16:07 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	6:16:07 PM	Tube furnace set to 0
9/11/2012	6:36:07 PM	Helium valve closed
9/11/2012	6:36:07 PM	H2 valve closed
9/11/2012	6:36:07 PM	BCl3 valve closed
9/11/2012	6:36:07 PM	PH3 valve closed
9/11/2012	6:36:07 PM	SiCl4 pre valve closed
9/11/2012	6:36:07 PM	SiCl4 post valve closed
9/11/2012	6:36:07 PM	Main Vac valve closed
9/11/2012	6:36:07 PM	Bypass valve closed
9/11/2012	6:36:07 PM	Bubbler valve closed
9/11/2012	6:36:07 PM	Helium MFC set to  0.000000
9/11/2012	6:36:07 PM	H2 MFC set to  0.000000
9/11/2012	6:36:07 PM	BCl3 MFC set to  0.000000
9/11/2012	6:36:07 PM	PH3 MFC set to  0.000000
9/11/2012	6:36:07 PM	SiCl4 MFC set to  0.000000
9/11/2012	6:36:07 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	6:36:08 PM	Tube furnace set to 0
9/11/2012	6:36:09 PM	Run finished at 6:36 PM
9/11/2012	6:39:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2012	6:39:51 PM	Recipe started at 6:39 PM
9/11/2012	6:39:51 PM	Helium valve closed
9/11/2012	6:39:51 PM	H2 valve closed
9/11/2012	6:39:51 PM	BCl3 valve closed
9/11/2012	6:39:51 PM	PH3 valve closed
9/11/2012	6:39:51 PM	SiCl4 pre valve closed
9/11/2012	6:39:51 PM	SiCl4 post valve closed
9/11/2012	6:39:51 PM	Main Vac valve closed
9/11/2012	6:39:51 PM	Bypass valve closed
9/11/2012	6:39:51 PM	Bubbler valve closed
9/11/2012	6:39:51 PM	Helium MFC set to  0.000000
9/11/2012	6:39:51 PM	H2 MFC set to  0.000000
9/11/2012	6:39:51 PM	BCl3 MFC set to  0.000000
9/11/2012	6:39:51 PM	PH3 MFC set to  0.000000
9/11/2012	6:39:51 PM	SiCl4 MFC set to  0.000000
9/11/2012	6:39:51 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	6:39:51 PM	Tube furnace set to 0
9/11/2012	6:39:54 PM	H2 valve closed
9/11/2012	6:39:54 PM	BCl3 valve closed
9/11/2012	6:39:54 PM	PH3 valve closed
9/11/2012	6:39:54 PM	SiCl4 pre valve closed
9/11/2012	6:39:54 PM	SiCl4 post valve closed
9/11/2012	6:39:54 PM	Main Vac valve closed
9/11/2012	6:39:54 PM	Bypass valve closed
9/11/2012	6:39:54 PM	Bubbler valve closed
9/11/2012	6:39:54 PM	Helium valve opened
9/11/2012	6:39:54 PM	Helium MFC set to  500.000000
9/11/2012	6:39:54 PM	H2 MFC set to  0.000000
9/11/2012	6:39:54 PM	BCl3 MFC set to  0.000000
9/11/2012	6:39:54 PM	PH3 MFC set to  0.000000
9/11/2012	6:39:54 PM	SiCl4 MFC set to  0.000000
9/11/2012	6:39:54 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	6:39:54 PM	Tube furnace set to 0
9/11/2012	6:39:54 PM	Helium valve closed
9/11/2012	6:39:54 PM	H2 valve closed
9/11/2012	6:39:54 PM	BCl3 valve closed
9/11/2012	6:39:54 PM	PH3 valve closed
9/11/2012	6:39:54 PM	SiCl4 pre valve closed
9/11/2012	6:39:54 PM	SiCl4 post valve closed
9/11/2012	6:39:54 PM	Main Vac valve closed
9/11/2012	6:39:54 PM	Bypass valve closed
9/11/2012	6:39:54 PM	Bubbler valve closed
9/11/2012	6:39:54 PM	Helium MFC set to  0.000000
9/11/2012	6:39:54 PM	H2 MFC set to  0.000000
9/11/2012	6:39:54 PM	BCl3 MFC set to  0.000000
9/11/2012	6:39:54 PM	PH3 MFC set to  0.000000
9/11/2012	6:39:54 PM	SiCl4 MFC set to  0.000000
9/11/2012	6:39:54 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	6:39:54 PM	Tube furnace set to 0
9/11/2012	6:39:56 PM	Run finished at 6:39 PM
9/11/2012	6:39:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/11/2012	6:42:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/11/2012	6:42:27 PM	Recipe started at 6:42 PM
9/11/2012	6:42:27 PM	Helium valve closed
9/11/2012	6:42:27 PM	H2 valve closed
9/11/2012	6:42:27 PM	BCl3 valve closed
9/11/2012	6:42:27 PM	PH3 valve closed
9/11/2012	6:42:27 PM	SiCl4 pre valve closed
9/11/2012	6:42:27 PM	SiCl4 post valve closed
9/11/2012	6:42:27 PM	Main Vac valve closed
9/11/2012	6:42:27 PM	Bubbler valve closed
9/11/2012	6:42:27 PM	Bypass valve opened
9/11/2012	6:42:27 PM	Helium MFC set to  0.000000
9/11/2012	6:42:27 PM	H2 MFC set to  0.000000
9/11/2012	6:42:27 PM	BCl3 MFC set to  0.000000
9/11/2012	6:42:27 PM	PH3 MFC set to  0.000000
9/11/2012	6:42:27 PM	SiCl4 MFC set to  0.000000
9/11/2012	6:42:27 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	6:42:27 PM	Tube furnace set to 0
9/11/2012	6:43:41 PM	Helium valve closed
9/11/2012	6:43:41 PM	H2 valve closed
9/11/2012	6:43:41 PM	BCl3 valve closed
9/11/2012	6:43:41 PM	PH3 valve closed
9/11/2012	6:43:41 PM	SiCl4 pre valve closed
9/11/2012	6:43:41 PM	SiCl4 post valve closed
9/11/2012	6:43:41 PM	Main Vac valve closed
9/11/2012	6:43:41 PM	Bubbler valve closed
9/11/2012	6:43:41 PM	Bypass valve opened
9/11/2012	6:43:41 PM	Helium MFC set to  0.000000
9/11/2012	6:43:41 PM	H2 MFC set to  0.000000
9/11/2012	6:43:41 PM	BCl3 MFC set to  0.000000
9/11/2012	6:43:41 PM	PH3 MFC set to  0.000000
9/11/2012	6:43:41 PM	SiCl4 MFC set to  0.000000
9/11/2012	6:43:41 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	6:43:41 PM	Tube furnace set to 0
9/11/2012	6:44:42 PM	Helium valve closed
9/11/2012	6:44:42 PM	H2 valve closed
9/11/2012	6:44:42 PM	BCl3 valve closed
9/11/2012	6:44:42 PM	PH3 valve closed
9/11/2012	6:44:42 PM	SiCl4 pre valve closed
9/11/2012	6:44:42 PM	SiCl4 post valve closed
9/11/2012	6:44:42 PM	Bypass valve closed
9/11/2012	6:44:42 PM	Bubbler valve closed
9/11/2012	6:44:42 PM	Main Vac valve opened
9/11/2012	6:44:42 PM	Helium MFC set to  0.000000
9/11/2012	6:44:42 PM	H2 MFC set to  0.000000
9/11/2012	6:44:42 PM	BCl3 MFC set to  0.000000
9/11/2012	6:44:42 PM	PH3 MFC set to  0.000000
9/11/2012	6:44:42 PM	SiCl4 MFC set to  0.000000
9/11/2012	6:44:42 PM	Bypass solenoid MFC set to  0.000000
9/11/2012	6:44:42 PM	Tube furnace set to 0
9/11/2012	6:44:43 PM	Run finished at 6:44 PM
9/11/2012	6:44:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
